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Method for wavelength trimming of optical components and optical components thus obtained
Inventors:
J. Schrauwen
,
D. Van Thourhout
,
R. Baets
Title:
Method for wavelength trimming of optical components and optical components thus obtained
Patent Nr:
US-61/021,250 (Pending, 1/2008)
Related Research Topics
Silicon (nano)photonic devices fabrication with 193nm and 248nm (DUV) Optical lithography (1999-2012)
WDM components
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