Authors:	J. Schrauwen, D. Van Thourhout, R. Baets
Title:	Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides
Format:	International Conference Poster
Publication date:	9/2006
Journal/Conference/Book:	IEEE Group IV Photonics
Volume(Issue):	P20
Location:	Ottawa, Canada
DOI:	10.1109/group4.2006.1708179
Citations:	1 (Dimensions.ai - last update: 17/11/2024) 1 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
Download:	(896KB)

Abstract

We fabricated grating couplers in silicon-on-insulator waveguides with focused-ion-beam. First devices were
very lossy, but by using selective etchant and a hard mask we obtained efficiencies comparable to traditional fabrication techniques.

Related Research Topics

• Focused-ion-beam fabrication (2005-2011)

Related Projects

• IAP-V: PHOTON (Photons and Photonics : from basic physics to system concepts)
• IST: ePIXnet (European Network of Excellence on Photonic Integrated Components and Circuits)
• FWO: Nanostructurering van metalen met Focussed Ion Beam