Authors:	J. Schrauwen, F. Van Laere, D. Van Thourhout, R. Baets
Title:	Focused-ion-beam fabrication of slanted grating couplers in silicon-on-insulator waveguides
Format:	International Journal
Publication date:	3/2007
Journal/Conference/Book:	Photonics Technology Letters
Volume(Issue):	19(11) p.816-818
DOI:	10.1109/lpt.2007.897293
Citations:	58 (Dimensions.ai - last update: 14/4/2024) 27 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract

We have designed and fabricated an efficient grating
coupler for coupling light between optical fibers and silicon-on-insulator waveguides. The coupler consists of 88nm wide slits, etched at an angle of 58° to the surface normal. They are defined by direct etching with a focused ion beam, using iodine gas and an alumina hard mask. The measured efficiency is 46%.

Related Research Topics

• Focused-ion-beam fabrication (2005-2011)

Related Projects

• IAP-V: PHOTON (Photons and Photonics : from basic physics to system concepts)
• FWO: Nanostructurering van metalen met Focussed Ion Beam