Photonics Research Group Home
Ghent University Journals/Proceedings
About People Research Publications Education
 IMEC
intern

 

Publication detail

Authors: J. Brouckaert, G. Roelkens, D. Van Thourhout, R. Baets
Title: Compact InAlAs/InGaAs Metal-Semiconductor-Metal Photodetectors Integrated on Silicon-on-Insulator Waveguides
Format: International Journal
Publication date: 10/2007
Journal/Conference/Book: IEEE Photonics Technology Letters
Volume(Issue): 19(19) p.1484-1486
Internal Reference: [N-635]
Download: Download this Publication (890KB) (890KB)

Abstract

We present measurement results of compact and efficient InAlAs/InGaAs metal-semiconductor-metal photo-detectors integrated on silicon-on-insulator (SOI) waveguides. These thin film devices are heterogeneously integrated on the SOI substrate by means of low-temperature die-to-wafer bonding using DVS-BCB. The responsivity of a 30ìm long detector is 1.0A/W at a wavelength of 1550nm and the dark current is 4.5nA at a bias voltage of 5V.

Related Research Topics

Related Projects


Back to publication list