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Heterogeneous integration of SOI waveguides and III-V active devices

Research Area: WDM sources, Heterogeneous Integration with Silicon Photonics

Main Researcher: Gunther Roelkens

Heterogeneous integration of SOI waveguides and III-V active devices combine the advantages of both material systems. SOI waveguides allow high density integrated photonics due to the high omnidirectional index contrast and the small features achievable using deep UV lithography. Active functions like optical amplification and laser action require a direct bandgap material (i.e. InGaAsP/InP).

The bonding of III-V active layers on top of SOI waveguide structures was developed. BenzoCycloButene (BCB) was used as a bonding agent.

Cross section of an SOI waveguide circuit with an InP layer bonded on top
Cross section of an SOI waveguide circuit with an InP layer bonded on top

Based on the technological development of BCB bonding an optical coupling scheme was designed based on an adiabatic taper structure, which allows for compact, efficient, large optical bandwidth operation and is tolerant to fabrication errors.

Layout of the coupling between the III-V active device and the SOI waveguide
Layout of the coupling between the III-V active device and the SOI waveguide

Devices were fabricated and characterized. Both laser action and photodetector operation was observed. A top view of the fabricated structures is shown.


Other people involved:

Related Research Projects

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(Nano)photonics in Silicon(-on-Insulator) (Nano)photonics in Silicon(-on-Insulator)
InP on silicon membrane technology InP on silicon membrane technology
IPRM08 IPRM08

PhD thesises

Publications

    International Journals

  1. S. Keyvaninia, M. Muneeb, S. Stankovic, René van Veldhoven, D. Van Thourhout, G. Roelkens, Ultra-thin DVS-BCB adhesive bonding of III-V wafers, dies and multiple dies to a patterned silicon-on-insulator substrate,Optical Materials Express, 3(1), p.35-46 (2013)  Download this Publication (965KB).
  2. S. Stankovic, Jones, Richard, Sysak, Matthew, Heck, John, G. Roelkens, D. Van Thourhout, Hybrid III-V/Si Distributed Feedback Laser Based on Adhesive Bonding,IEEE Photonics Technology Letters, 24(23), p.2155-2158 (2012)  Download this Publication (625KB).
  3. S. Keyvaninia, G. Roelkens, D. Van Thourhout, Christophe Jany, Marco Lamponi, Alban Le Liepvre , Francois Lelarge , Dalila Make, Guang-Hua Duan, Damien Bordel, Jean-Marc Fedeli, Demonstration of a heterogeneously integrated III-V/SOI single wavelength tunable laser ,accepted for publication in Optics Express,  (to be published).
  4. T. Spuesens, F. Mandorlo, P. Rojo-Romeo, P. Regreny, N. Olivier, J.M. Fedeli, D. Van Thourhout, Compact integration of optical sources and detectors on SOI for optical interconnects fabricated in a 200 mm CMOS pilot line,Journal of Lightwave Technology, 30(11), p.1764-1770 (2012)  Download this Publication (1.3MB).
  5. J. Hofrichter, T. Morf, A. La Porta, B.J. Offrein, P. Mechet, G. Morthier, T. De Vries, H.J.S. Dorren, O. Raz, Inverting and Non-Inverting Operation of InP Microdisk Modulators,Electronics Letters, (2012)  Download this Publication (265KB).
  6. M. Tassaert, H.J.S Dorren, G. Roelkens, O. Raz, Passive InP regenerator integrated on SOI for the support of broadband silicon modulators,Optics Express, 20(10), p.11383-11388 (2012)  Download this Publication (1.4MB).
  7. Joan Lloret, G. Morthier, Francisco Ramos, Salvador Sales, D. Van Thourhout, T. Spuesens, Nicolas Olivier, Jean-Marc Fedeli, Jose Capmany, Broadband microwave photonic fully tunable filter using a single heterogeneously integrated III-V/SOI-microdisk-based phase shifter,Optics Express, p.10796-10806 (2012)  Download this Publication (854KB).
  8. J. Hofrichter, O. Raz, A. La Porta, T. Morf, P. Mechet, G. Morthier, T. De Vries, H.J. S. Dorren, B.J. Offrein, A low–power high–speed InP microdisk modulator heterogeneously integrated on a SOI waveguide,Optics Express, 20(9), p.9363-9370 (2012)  Download this Publication (2.4MB).
  9. M. Tassaert, S. Keyvaninia, D. Van Thourhout, W.M.J. Green, Y. Vlasov, G. Roelkens, An optically pumped nanophotonic InP/InGaAlAs optical amplifier integrated on a SOI waveguide circuit,Optical and Quantum Electronics (invited), 44(12), p.513-519 (2012)  Download this Publication (527KB).
  10. J. Lloret, R. Kumar, S. Sales, F. Ramos, G. Morthier, P. Mechet, T. Spuesens, D. Van Thourhout, N. Olivier, J.-M. Fedeli, J. Capmany, Ultra-compact electro-optic phase modulator based on III-V-on-silicon microdisk resonator,Optics Letters, 37(12), p.2379-2381 (2012)  Download this Publication (437KB).
  11. M. Tassaert, G. Roelkens, H.J.S. Dorren, D. Van Thourhout, O. Raz, Bias-free, low power and optically driven membrane InP switch on SOI for remotely configurable photonic packet switches,Optics Express, 19(26), p.B817-B824 (2011)  Download this Publication (3MB).
  12. S. Stankovic, Jones, Richard, Sysak, Matthew, Heck, John, G. Roelkens, D. Van Thourhout, 1310 nm Hybrid III-V/Si Fabry-Perot Laser Based on Adhesive Bonding,IEEE Photonics Technology Letters, 23(23), p.1781-1783 (2011)  Download this Publication (613KB).
  13. Jens Hofrichter, Oded Raz, Liu Liu, G. Morthier, Folkert Horst, Philippe Regreny, Tsjibbe de Vries, Harm Dorren, Bert Offrein, All-optical wavelength conversion using mode switching in InP microdisc laser,Electronics Letter, 47(16), United Kingdom, p.927-929 (2011)  Download this Publication (247KB).
  14. M. Tassaert, D. Van Thourhout, G. Roelkens, Strategies to increase the modal gain in heterogeneously integrated III-V amplifiers on Silicon-On-Insulator,Optical and Quantum Electronics, p.683-689  (2011)  Download this Publication (790KB).
  15. S. Stankovic, Jones, Richard, Heck, John, Sysak, Matthew, D. Van Thourhout, G. Roelkens, Die-to-Die Adhesive Bonding Procedure for Evanescently-Coupled Photonic Devices,Electrochemical and Solid-State Letters, 14(8), p.H326-H329 (2011)  Download this Publication (1.6MB).
  16. G. Roelkens, L. Liu, D. Liang, R. Jones, A. Fang, B. Koch, J. Bowers, III-V/silicon photonics for on-chip and inter-chip optical interconnects,Laser & Photonics reviews (invited), p.DOI: 10.1002/lpor.200900033 (2010)  Download this Publication (7MB).
  17. L. Liu, G. Roelkens, J. Van Campenhout, J. Brouckaert, D. Van Thourhout, R. Baets, III-V/silicon-on-insulator nanophotonic cavities for optical network-on-chip,Journal of Nanoscience and Nanotechnology (invited), 10, p.1461-1472 (2010)  Download this Publication (1.8MB).
  18. Di Liang, G. Roelkens, R. Baets, John E. Bowers, Hybrid integrated platforms for silicon photonics,Materials, 3(3), p.1782-1802 (2010)  Download this Publication (956KB).
  19. Y. Halioua, T. Karle, F. Raineri, P. Monnier, I. Sagnes, R. Raj, G. Roelkens, D. Van Thourhout, Hybrid InP-based photonic crystal lasers on silicon on insulator wires,Applied Physics Letters, 95(20), p.201119 (2009)  Download this Publication (321KB).
  20. J. Brouckaert, G. Roelkens, S. Selvaraja, W. Bogaerts, P. Dumon, S. Verstuyft, D. Van Thourhout, R. Baets, Silicon-on-Insulator CWDM Power Monitor/Receiver with Integrated Thin Film InGaAs Photodetectors,IEEE Photonics Technology Letters, 21(19), p.1423 (2009)  Download this Publication (350KB).
  21. L. Liu, J. Van Campenhout, G. Roelkens, Richard A. Soref, D. Van Thourhout, Pedro Rojo-Romeo, Philippe Regreny, Christian Seassal, Jean-Marc Fédéli, R. Baets, Carrier-injection-based electro-optic modulator on silicon-on-insulator with a heterogeneously integrated III-V microdisk cavity,Optics Letters, 33(21), p.2518 (2008)  Download this Publication (323KB).
  22. L. Liu, J. Van Campenhout, G. Roelkens, D. Van Thourhout, Pedro Rojo Romeo, Philippe Regreny, Christian Seassal, Jean-Marc Fédéli, R. Baets, Ultralow-power all-optical wavelength conversion in a silicon-on-insulator waveguide based on a heterogeneously integrated III-V microdisk laser,Applied Physics Letters, 93(6), p.061107 (2008)  Download this Publication (146KB).
  23. G. Roelkens, L. Liu, D. Van Thourhout, R. Baets, R. Notzel, F. Raineri, I. Sagnes, G. Beaudoin, R. Raj, Light emission and enhanced nonlinearity in nanophotonic waveguide circuits by III-V/SOI heterogeneous integration,Journal of Applied Physics, 104(3), p.033117 (2008)  Download this Publication (678KB).
  24. J. Van Campenhout, L. Liu, Pedro Rojo Romeo, D. Van Thourhout, Christian Seassal, Philippe Regreny, Lea Di Cioccio, Jean-Marc Fedeli, R. Baets, A Compact SOI-Integrated Multiwavelength Laser Source Based on Cascaded InP Microdisks,IEEE PHOTONICS TECHNOLOGY LETTERS, 20(16), p.1345-1347 (2008)  Download this Publication (226KB).
  25. J. Brouckaert, G. Roelkens, D. Van Thourhout, R. Baets, Compact InAlAs/InGaAs Metal-Semiconductor-Metal Photodetectors Integrated on Silicon-on-Insulator Waveguides,IEEE Photonics Technology Letters, 19(19), p.1484-1486 (2007)  Download this Publication (890KB).
  26. J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Baets, Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit,Optics Express, 15(11), p.6744-6749 (2007)  Download this Publication (2.5MB).
  27. J. Brouckaert, G. Roelkens, D. Van Thourhout, R. Baets, Thin-Film III–V Photodetectors Integrated on Silicon-on-Insulator Photonic ICs,Journal of Lightwave Technology, 25(4), p.1053-1060 (2007)  Download this Publication (480KB).
  28. G. Roelkens, D. Van Thourhout, R. Baets, High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay,Optics Express, 14(24), p.11622-11630 (2006)  Download this Publication (803KB).
  29. G. Roelkens, J. Brouckaert, D. Van Thourhout, R. Baets, R. Notzel, M. Smit, Adhesive Bonding of InP/InGaAsP Dies to Processed Silicon-on-Insulator Wafers using DVS-bis-Benzocyclobutene,Journal of Electrochemical Society, 153(12), p.G1015-G1019 (2006)  Download this Publication (691KB).
  30. G. Roelkens, D. Van Thourhout, R. Baets, R. Notzel, M. Smit, Laser emission and photodetection in an InP/InGaAsP layer integrated on and coupled to a Silicon-on-Insulator waveguide circuit,Optics Express, 14(18), p.8154-8159 (2006)  Download this Publication (857KB).
  31. G. Roelkens, J. Brouckaert, D. Taillaert, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Integration of InP/InGaAsP photodetectors onto Silicon-on-Insulator waveguide circuits,Optics Express, 13(25), p.10102-10108 (2005)  Download this Publication (551KB).
  32. G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Efficient Silicon-on-Insulator fiber coupler fabricated using 248nm deep UV lithography,Photonics Technology Letters, 17(12), p.2613-2615 (2005)  Download this Publication (608KB).
  33. G. Roelkens, D. Van Thourhout, R. Baets, Coupling schemes for heterogeneous integration of III-V membrane devices ,Journal of Lightwave Technology, 23(11), p.3827-3831 (2005)  Download this Publication (279KB).
  34. G. Roelkens, D. Van Thourhout, R. Baets, Ultra-thin benzocyclobutene bonding of III-V dies onto SOI substrates,Electronics Letters, 41(9), p.561-562 (2005)  Download this Publication (1.2MB).
  35. I. Christiaens, G. Roelkens, K. De Mesel, D. Van Thourhout, R. Baets, Thin film devices fabricated with BCB waferbonding,Journal of Lightwave Technology, 23(2), p.517 (2005)  Download this Publication (1.1MB).
    Book / Book Chapter

  1. W. Bogaerts, S. Selvaraja, SOI for photonics,(invited) publication in Silicon on insulator (SOI) technology ,  (to be published).
    International Conferences

  1. O. Raz, M. Tassaert, G. Roelkens, H.J.S. Dorren, Membrane InP Saturable Absorbers on Silicon as Building Blocks for Transparent Optical Networks,(invited) publication in ICTON 2013, Spain,  (to be published).
  2. G. Morthier, P. Mechet, T. Spuesens, G. Roelkens, D. Van Thourhout, Heterogeneously integrated InP microdisk lasers,(invited) publication in ICNP/AOM 2013,  (to be published).
  3. Z. Wang, B. Tian, Mohan Paladugu, Marianna Pantouvaki, Joris Van Campenhour, Clement Merckling, Weiming Guo, Matty Caymax , Johan Dekoster, D. Van Thourhout, Ultra-Compact Indium Phosphide Nanowire Laser Monolithic Integrated on Silicon,accepted for publication in The 25th International Conference on Indium Phosphide and Related Materials, Japan,  (to be published).
  4. P. Mechet, T. Spuesens, N. Olivier, J.-M. Fedeli, P. Regreny, D. Van Thourhout, G. Roelkens, G. Morthier, All-optical, low-power 2R regeneration of 10Gb/s NRZ signals using a III-V on SOI microdisk laser,accepted for publication in Photonics in Switching 2013,  (to be published).
  5. O. Raz, M. Tassaert, G. Roelkens, H. Dorren, Optically reconfigurable 1x4 SOI remote node switch for access networks,OFC/NFOEC, United States, p.PDP5C.2 (2013)  Download this Publication (1011KB).
  6. M. Tassaert, H.J.S. Dorren, G. Roelkens, O. Raz, Broadband Passive InP Membrane Regenerator for Silicon-based Optical Interconnect Applications,OFC/NFOEC, United States, p.OW3D.4 (2013)  Download this Publication (855KB).
  7. S. Keyvaninia, G. Roelkens, R. Baets, F. Lelarge, G-.H. Duan, S. Messaoudene, J.-M. Fedeli , D. Van Thourhout, Demonstration of a novel III-V-on-Si distributed feedback laser ,accepted for publication in Conference on Optical Fiber Communication (OFC) and the National Fiber Optic Engineers Conference (NFOEC), (2013),  (to be published).
  8. G. Duan, C. Jany, A. Le Liepvre, M. Lamponi, A. Accard, F. Poingt, D. Make, F. Lelarge, S. Messaoudene, D. Bordel, J.M. Fedeli, S. Keyvaninia, G. Roelkens, D. Van Thourhout, D. Thomson, F. Gardes, G. Reed, III-V on Silicon Transmitters ,(invited) publication in Conference on Optical Fiber Communication (OFC) and the National Fiber Optic Engineers Conference (NFOEC), (2013), United States,  (to be published).
  9. N. Hattasan, A. Gassenq, L. Cerutti, J.B. Rodriguez, E. Tournié, G. Roelkens, GaSb-based integrated lasers and photodetectors on a Silicon-On-Insulator waveguide circuit for sensing applications in the shortwave infrared,Photonics Global Conference 2012, Singapore, (2012)  Download this Publication (399KB).
  10. P. Mechet, S. Verstuyft, I. Sagnes, G. Roelkens, G. Morthier, Numerical and Experimental Study of IIIâ€V on SOI Microdisk Lasers with pâ€iâ€n Junction,Proceedings of the 2012 Annual Symposium of the IEEE Photononics Benelux Chapter, Belgium, (2012)  Download this Publication (504KB).
  11. M. Tassaert, G. Roelkens, H.J.S. Dorren, D. Van Thourhout, O. Raz, A Heterogeneously Integrated III-V Membrane on Silicon-On-Insulator for All-Optical Signal Processing Applications,Proceedings of the 2012 Annual Symposium of the IEEE Photonics Society Belenux Chapter, Belgium, p.37-40 (2012)  Download this Publication (1.1MB).
  12. S. Keyvaninia, S. Verstuyft, F. Lelarge, G.-H. Duan , S. Messaoudene, J.M. Fedeli , T. De Vries , B. Smalbrugge, J. Bolk, M. Smit, D. Van Thourhout, Heterogeneously integrated III-V/Si multi-wavelength laser based on a ring resonator array multiplexer ,Asia Communications and Photonics Conference (ACP), (2012)  Download this Publication (379KB).
  13. P. De Heyn, S. Verstuyft, S. Keyvaninia, A. Trita, D. Van Thourhout, Tunable 4-Channel Ultra-Dense WDM Demultiplexer with III-V Photodiodes Integrated on Silicon-on-Insulator,Asia Communications and Photonics Conference (ACP) , China, p.1-3 (2012)  Download this Publication (477KB).
  14. Y. De Koninck, F. Raineri, A. Bazin, R. Raj, G. Roelkens, R. Baets, Demonstration of a novel single-mode hybrid silicon microlaser,IEEE Photonics Conference, United States, (2012).
  15. Y. De Koninck, S. Keyvaninia, S. Stankovic, D. Van Thourhout, G. Roelkens, R. Baets, Hybrid silicon lasers for optical interconnect,IEEE Photonics Conference 2012 (invited), United States, p.812-813 (2012)  Download this Publication (271KB).
  16. N. Hattasan, A. Gassenq, L. Cerutti, J.B. Rodriguez, E. Tournié, G. Roelkens, InGaAsSb/GaSb lasers and photodetectors integrated on a Silicon-On-Insulator waveguide circuit for spectroscopic applications,International Workshop on Opportunities and Challenges in Mid-infrared Laser-based Gas Sensing (MIRSENS2), Poland, (2012)  Download this Publication (169KB).
  17. Y. De Koninck, A. Bazin, F. Raineri, R. Raj, G. Roelkens, R. Baets, Experimental demonstration of novel heterogeneously integrated III-V on Si microlaser,accepted for publication in SPIE Photonics West,  (to be published).
  18. T. Spuesens, Y. De Koninck, D. Van Thourhout, Efficient vertical coupling between a silicon waveguide and an InP-based microdisk,16th European Conference on Integrated Optics (ECIO 2012), Spain, p.paper 212 (2012)  Download this Publication (537KB).
  19. J. Hofrichter, A. La Porta, T. Morf, B.J. Offrein, P. Mechet, G. Morthier, T. De Vries, H.J.S. Dorren, O. Raz, Compact High–Speed InP Microdisk Modulators Heterogeneously Integrated on a SOI Waveguide,accepted for publication in IEEE Optical Interconnects, United States,  (to be published).
  20. Joan Lloret, F. Ramos, S. Sales, J. Capmany, G. Morthier, D. Van Thourhout, T. Spuesens, N. Olivier, J.-M. Fedeli, Fully tunable microwave photonic phase shifter for broadband signals based on a single heterogeneously integrated III-V-on-SOI microdisk resonator,16th European Conference on Integrated Optics (ECIO 2012), Spain, p.paper 158 (2012)  Download this Publication (510KB).
  21. O. Raz, M. Tassaert, G. Roelkens, H.J.S. Dorren, InP Membrane Based Broadband Regenerator for silicon-based optical interconnect applications,IEEE Optical Interconnects Conference 2012, United States, p.paper MB3 (2012)  Download this Publication (322KB).
  22. T. Spuesens, D. Van Thourhout, P. Rojo Romeo, P. Regreny, J.M. Fedeli, CW operation of III-V microdisk lasers on SOI fabricated in a 200 mm CMOS pilot line,Group IV Photonics 2011, p.199-201 (2011)  Download this Publication (458KB).
  23. S. Stankovic, G. Roelkens, D. Van Thourhout, R. Jones, M. Sysak, J. Heck, 1310nm evanescent hybrid III-V/Si laser based on DVS-BCB bonding,Integrated Photonics Research, Silicon and Nano-Photonics (IPR), Canada, p.IWC3 (2011)  Download this Publication (302KB).
  24. Y. Halioua, A. Bazin, T. Karle, P. Monnier, I. Sagnes, R. Raj, F. Raineri, Optimally Coupled Hybrid III-V Photonics Crystal Wire Cavity CW Lasers on Passive SOI Waveguides,,Integrated Photonics Research, Silicon and Nano-Photonics (IPR), Canada, p.IWC4 (2011)  Download this Publication (263KB).
  25. W. Bogaerts, S. Selvaraja, H. Yu, T. Spuesens, P. Mechet, S. Stankovic, S. Keyvaninia, J. Van Campenhout, P. Absil, G. Roelkens, D. Van Thourhout, R. Baets, A Silicon Photonics Platform with Heterogeneous III-V Integration,Integrated Photonics Research, Silicon and Nano-Photonics (IPR) (invited), Canada, p.IWC2 (2011)  Download this Publication (283KB).
  26. M. Tassaert, S. Keyvaninia, D. Van Thourhout, W.M.J. Green, Y. Vlasov, G. Roelkens, A nanophotonic InP/InGaAlAs optical amplifier integrated on a Silicon-On-Insulator waveguide circuit ,Information Photonics 2011, Canada, (2011)  Download this Publication (395KB).
  27. W. Bogaerts, P. Absil, D. Van Thourhout, J. Van Campenhout, S. Selvaraja, P. Dumon, H. Yu, A. Masood, G. Roelkens, R. Baets, Optical Interconnect Technologies based on Silicon Photonics,MRS Spring 2011 (invited), United States, p.O10.1 (2011)  Download this Publication (926KB).
  28. T. Spuesens, L. Liu, D. Vermeulen, J. Zhao, P. Rojo Romeo, P. Regreny, L. Grenouillet, J.M. Fedeli, D. Van Thourhout, Integration of photodetectors with lasers for optical interconnects using 200 mm waferscale III-V/SOI technology,The Optical Fiber Communication Conference and Exposition (OFC) and The National Fiber Optic Engineers Conference (NFOEC) 2011, (2011)  Download this Publication (291KB).
  29. P. Mechet, L. Liu, R. Kumar, K. Huybrechts, T. Spuesens, G. Roelkens, E.-J. Geluk , T. De Vries , P. Regreny , D. Van Thourhout, R. Baets, G. Morthier, Heterogeneously Integrated Microdisk Lasers for Optical Interconnects and Optical Logic,SPIE Photonics West 2011 (invited), 7913, United States, p.791319 (2011)  Download this Publication (896KB).
  30. G. Roelkens, Y. De Koninck, S. Keyvaninia, S. Stankovic, M. Tassaert, M. Lamponi, G. Duan, D. Van Thourhout, R. Baets, Hybrid Silicon Lasers,SPIE Photonics West 2011 (invited), United States, (2011)  Download this Publication (1.4MB).
  31. S. Stankovic, G. Roelkens, D. Van Thourhout, Jones, Richard, Sysak, Matt, Heck, John, Evanescently-Coupled Hybrid III-V/Silicon Laser Based on DVS-BCB Bonding,15th Annual Symposium of IEEE Photonics Society Benelux Chapter, Netherlands, p.77-80 (2010)  Download this Publication (1.7MB).
  32. Y. De Koninck, G. Roelkens, R. Baets, Hybrid III-V/silicon micro-lasers based on resonant cavity reflectors,15th Annual Meeting of the IEEE Photonics Society Benelux chapter, Netherlands, (2010)  Download this Publication (226KB).
  33. M. Tassaert, S. Keyvaninia, D. Van Thourhout, G. Roelkens, Strategies to increase the modal gain in electrically pumped quantum dot based amplifiers integrated on a Silicon-On-Insulator waveguide circuit,Photonics Society Benelux meeting, Netherlands, (2010)  Download this Publication (218KB).
  34. S. Stankovic, D. Van Thourhout, G. Roelkens, R. Jones, J. Heck, M. Sysak, Die-to-die adhesive bonding for evanescently-coupled photonic devices,218th ECS Meeting, Symposium on Wafer Bonding / ECS Transactions, 33(4), United States, p.411-420 (2010)  Download this Publication (545KB).
  35. W. Bogaerts, R. Baets, G. Roelkens, D. Van Thourhout, p. Absil, S. Selvaraja, H. Yu, A. Masood, A silicon photonics platform with heterogeneous III-V integration,Workshop on the Future of Silicon Photonics (invited), China, p.11 (2010)  Download this Publication (353KB).
  36. M. Lamponi, S. Keyvaninia, F. Pommereau, F. Lelarge, G. de Valicourt, G. Roelkens, D. Van Thourhout, D. Bordelc, S. Messaoudenec, J.-M. Fedelic, G.-H. Duana, Heterogeneously integrated InP/SOI laser using double tapered single-mode waveguides through InP die to SOI wafer bonding,Group IV Photonics , p.WB6 (2010)  Download this Publication (163KB).
  37. N. Hattasan, L. Cerutti, J.B. Rodriguez, E. Tournié, D. Van Thourhout, G. Roelkens, Heterogeneous Integration of GaSb-based epitaxy on silicon-on-insulator: towards mid-infrared photonic integrated circuits for environmental and bio-medical applications,10th International Conference on Mid-Infrared Optoelectronics: Materials and Devices , China, p.90-91 (2010)  Download this Publication (157KB).
  38. Y. Halioua, A. Bazin, P. Monnier, T. Karle, I. Sagnes, G. Roelkens, D. Van Thourhout, F. Raineri, R. Raj, Hybrid III-V laser on silicon wire,InP and Related Materials, Japan, p.FrA2-2 (2010)  Download this Publication (167KB).
  39. S. Keyvaninia, G. Roelkens, D. Van Thourhout, Engineering the heterogeneously integrated III-V/SOI tunable laser ,14th Annual Symposium of the IEEE Photonics Benelux Chapter, Belgium, p.141-144 (2009)  Download this Publication (1.2MB).
  40. G. Roelkens, L. Liu, T. Spuesens, T. De Vries, P. Regreny, D. Van Thourhout, R. Baets, Progress in III-V/SOI photonic integrated circuits,The 22nd Annual Meeting of the IEEE Photonics Society (invited), TuN1, Turkey, p.240-241 (2009)  Download this Publication (351KB).
  41. F. Bordas, G. Roelkens, R. Zhang, E.J. Geluk, F. Karouta, J. van der Tol, P. van Veldhoven, R. Notzel, D. Van Thourhout, R. Baets, M. Smit, Compact passive devices in InP membrane on Silicon,35th European Conference on Optical Communications (ECOC 2009), Austria, p.4.2.4 (2009)  Download this Publication (86KB).
  42. D. Van Thourhout, G. Roelkens, Heterogeneously Integrated SOI Compound Semiconductor Photonics,35th European Conference on Optical Communications (ECOC 2009) (invited), Austria, p.4.2.1 (2009)  Download this Publication (827KB).
  43. P.R.A. Binetti, X.J.M. Leijtens, T. De Vries, Y.S. Oei, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, J. Van Campenhout, D. Van Thourhout, P.J. van Veldhoven, R. Noetzel, M.K. Smit, InP/InGaAs Photodetector on SOI Circuitry,6th IEEE International Conference on Group IV Photonics, United States, p.FA7 (2009)  Download this Publication (770KB).
  44. Y. Halioua, T.J. Karle, F. Raineri, I. Sagnes, R. Raj, G. Roelkens, F. Van Laere, D. Van Thourhout, InP-based 2D photonic crystal lasers heterogeneously integrated and coupled to SOI wires,6th IEEE International Conference on Group IV Photonics, United States, p.ThP12 (2009)  Download this Publication (433KB).
  45. T. Spuesens, L. Liu, T. De Vries, P. Rojo-Romeo, P. Regreny, D. Van Thourhout, Improved design of an InP-based microdisk laser heterogeneously integrated with SOI,6th IEEE International Conference on Group IV Photonics, United States, p.FA3 (2009)  Download this Publication (1.4MB).
  46. T. Karle, Y. Halioua, F. Raineri, I. Sagnes, R. Raj, G. Roelkens, F. Van Laere, D. Van Thourhout, III-V photonic crystal lasers heterogeneously bonded to silicon-on-insulator waveguides,ICTON 2009 (invited), Portugal, (2009)  Download this Publication (160KB).
  47. Y. Halioua, T. Karle, F. Raineri, I. Sagnes, P. Monnier, R. Raj, G. Roelkens, D. Van Thourhout, R. Baets, Towards a new platform for integrated optics: III-V photonic crystals bonded to silicon on insulator wire waveguides,CLEO Europe, Germany, p.JSI1.3-TuE (2009)  Download this Publication (1.1MB).
  48. Y. Halioua, T. Karle, I. Sagnes, G. Roelkens, D. Van Thourhout, R. Raj, F. Raineri, InP 2-D Photonic Crystal lasers integrated onto SOI waveguides,Conference on Lasers and Electro-optics (CLEO), United States, p.CMP3 (2009)  Download this Publication (1.1MB).
  49. L. Liu, J. Brouckaert, G. Roelkens, D. Van Thourhout, R. Baets, Compact, Wavelength-Selective Resonant Photodetector Based on III-V/Silicon-on-Insulator Heterogeneous Integration,CLEO 2009, United States, p.CTuV3 (2009)  Download this Publication (362KB).
  50. J. Brouckaert, S. Selvaraja, W. Bogaerts, G. Roelkens, M.Y. Ling, J. Allaert, P. Dumon, D. Van Thourhout, R. Baets, Silicon-on-Insulator Microspectrometer,13th Annual Symposium of the IEEE/LEOS Benelux chapter, Netherlands, p.7-10 (2008)  Download this Publication (456KB).
  51. S. Stankovic, G. Roelkens, D. Van Thourhout, R. Baets, R. Jones, M. Sysak, B. Koch, Hybrid III-V/Silicon laser based on DVS-BCB bonding,13th Annual Symposium of the IEEE/LEOS Benelux Chapter, Netherlands, p.139-142 (2008)  Download this Publication (138KB).
  52. J. Brouckaert, G. Roelkens, S. Selvaraja, W. Bogaerts, P. Dumon, S. Verstuyft, Z. Yu, D. Van Thourhout, R. Baets, Miniature Integrated Spectrometer Fabricated on a Silicon-on-Insulator Substrate,Leos Annual Meeting, United States, p.MF3 (2008)  Download this Publication (1MB).
  53. L. Liu, J. Van Campenhout, G. Roelkens, D. Van Thourhout, R. Baets, IIIV/SOI Heterogeneous Integration of Optoelectronic Devices,Asia Optical Fiber Communication and Optoelectronic Exhibition and Conference 2008 (invited), China, p.SaN6 (2008)  Download this Publication (323KB).
  54. L. Liu, J. Van Campenhout, G. Roelkens, Richard Soref, D. Van Thourhout, Pedro Rojo Romeo, Philippe Regreny , Christian Seassal , Jean-Marc Fédéli , R. Baets, Compact Optical Modulator based on Carrier Induced Gain of an InP/InGaAsP Micro-disk Cavity Integrated on SOI,APOC 2008, China, (2008)  Download this Publication (599KB).
  55. L. Liu, J. Van Campenhout, G. Roelkens, D. Van Thourhout, Pedro Rojo Romeo, Philippe Regreny, Christian Seassal, Jean-Marc Fédéli, R. Baets, All-Optical Wavelength Converter with InP Micro-disk Laser Integrated on SOI,ECOC 2008, Belgium, p.Tu..C.3 (2008)  Download this Publication (347KB).
  56. G. Roelkens, L. Liu, D. Van Thourhout, R. Baets, R. Notzel, F. Raineri, I. Sagnes, G. Beaudoin, R. Raj, Enhanced nonlinearity in SOI microcavities by III-V/SOI heterogeneous integration,ECOC, Belgium, p.Tu.4.C.2 (2008)  Download this Publication (530KB).
  57. J. Brouckaert, G. Roelkens, S. Selvaraja, W. Bogaerts, P. Dumon, S. Verstuyft, D. Van Thourhout, R. Baets, Compact Silicon-on-Insulator Wavelength Demultiplexer with Heterogeneously Integrated InAlAs/InGaAs Photodetectors,ECOC 2008, Belgium, p.Tu.4.C.5 (2008)  Download this Publication (764KB).
  58. G. Roelkens, L. Liu, J. Van Campenhout, J. Brouckaert, D. Van Thourhout, R. Baets, Heterogeneous III-V/SOI photonic integrated circuits,Photonics in Switching (invited), Japan, (2008)  Download this Publication (1.1MB).
  59. G. Roelkens, L. Liu, J. Brouckaert, J. Van Campenhout, F. Van Laere, D. Van Thourhout, R. Baets, III-V/Silicon photonics: technology and integrated devices,IPNRA (invited), United States, (2008)  Download this Publication (344KB).
  60. G. Roelkens, W. Bogaerts, D. Taillaert, P. Dumon, L. Liu, S. Selvaraja, J. Brouckaert, J. Van Campenhout, K. De Vos, P.P.P. Debackere, D. Van Thourhout, R. Baets, Silicon nanophotonics: towards VLSI photonic integrated circuits,URSI (invited), United States, (2008)  Download this Publication (301KB).
  61. G. Roelkens, J. Brouckaert, L. Liu, J. Van Campenhout, F. Van Laere, D. Van Thourhout, R. Baets, Wafer bonding and heterogeneous integration: technology and integrated devices,ECIO (invited), Netherlands, (2008)  Download this Publication (1MB).
  62. S. Stankovic, G. Roelkens, D. Van Thourhout, R. Baets, R. Jones, Hybrid III-V/Silicon laser based on DVS-BCB die-to-wafer bonding,ePIXnet Spring School 2008, poster nr. 42, Italy, (2008)  Download this Publication (659KB).
  63. L. Liu, D. Van Thourhout, G. Roelkens, J. Brouckaert, R. Baets, III-V on Silicon Photonics,32nd Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDICE 2008 (invited), Belgium, (2008)  Download this Publication (12KB).
  64. T. Karle, Y. Halioua, F. Raineri, I. Sagnes, D. Van Thourhout, F. Van Laere, G. Roelkens, R. Raj, Laser emission from heterogeneously integrated InP photonic crystals into SOI wires,PECS VII, United States, (2008)  Download this Publication (117KB).
  65. D. Van Thourhout, J. Van Campenhout, G. Roelkens, J. Brouckaert, R. Baets, III-V Silicon heterogeneous integration for integrated transmitters and receivers,Photonics West 2008 (invited), United States, p.conference 6896, session 8 (2008)  Download this Publication (785KB).
  66. G. Roelkens, J. Brouckaert, J. Van Campenhout, D. Van Thourhout, R. Baets, Heterogeneous integration of III-V active devices on a silicon-on-insulator photonic platform,Group IV photonics (invited), Japan, (2007)  Download this Publication (1.1MB).
  67. J. Brouckaert, W. Bogaerts, P. Dumon, S. Selvaraja, G. Roelkens, D. Van Thourhout, R. Baets, Planar Concave Grating Demultiplexer with Distributed Bragg Reflection Facets,Group IV Photonics, Japan, p.WA5 (2007)  Download this Publication (1.6MB).
  68. D. Van Thourhout, J. Van Campenhout, R. Baets, Pedro Rojo-Romeo, Phillippe Regreny, Christian Seassal, Chrystelle Lagahe, Xaveer Leijtens, Pietro Binetti, Richard Notzel, Meint Smit, Lea Di Cioccio, Jean-Marc Fedeli, Invited: A Photonic Interconnect Layer on CMOS,ECOC 2007 - European Conference on Optical Communications (invited), Germany, p.6.3.1 (2007)  Download this Publication (130KB).
  69. J. Brouckaert, G. Roelkens, D. Van Thourhout, R. Baets, Thin film InGaAs/InAIAs photodetectors integrated on a silicon-on-insulator waveguide substrate,33rd European Conference and Exhibition on Optical Communication (ECOC 07), 2, Germany, p.251-252 (2007)  Download this Publication (829KB).
  70. G. Roelkens, J. Brouckaert, J. Van Campenhout, D. Van Thourhout, R. Baets, III-V/Silicon photonics for optical interconnects: bonding technology and integrated devices,Frontiers in Optics (invited), United States, (2007)  Download this Publication (26KB).
  71. J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, L. Di Cioccio, J. M. Fedeli, R. Baets, Electrically Pumped InP-based Microdisk Lasers Integrated with a Nanophotonic SOI Waveguide Circuit,OFC 2007, United States, p.PDP 35 (2007)  Download this Publication (3.8MB).
  72. J. Brouckaert, G. Roelkens, D. Van Thourhout, R. Baets, Thin film InGaAs MSM photodetectors integrated onto silicon-on-insulator waveguide circuits,LEOS Benelux Annual Symposium, Netherlands, (2006)  Download this Publication (1.2MB).
  73. G. Roelkens, J. Brouckaert, D. Van Thourhout, R. Baets, Adhesive bonding of III-V dies to processed SOI using BCB for photonic applications,210th Electrochemical Society meeting, Mexico, (2006)  Download this Publication (451KB).
  74. G. Roelkens, J. Brouckaert, D. Van Thourhout, R. Baets, Thin film III-V devices integrated on Silicon-on-Insulator waveguide circuits,210th Electrochemical Society meeting, Mexico, (2006)  Download this Publication (576KB).
  75. O. Rits, M. De Wilde, G. Roelkens, R. Bockstaele, R. Annen, M. Bossard, F. Marion, R. Baets, 2D parallel optical interconnects between CMOS ICs,SPIE Photonics West, 6124, United States, p.168-179 (2006)  Download this Publication (2.7MB).
  76. G. Roelkens, J. Brouckaert, S. Verstuyft, J. Schrauwen, D. Van Thourhout, R. Baets, Heterogeneous integration of III-V photodetectors and laser diodes on Silicon-on-Insulator waveguide circuits,Group IV photonics 2006, Canada, p.ThB2 (2006)  Download this Publication (1.5MB).
  77. F. Van Laere, G. Roelkens, J. Schrauwen, D. Taillaert, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Compact grating couplers between optical fibers and Silicon-on-Insulator photonic wire waveguides with 69% coupling efficiency,OFC 2006, United States, p.PDP15 (2006)  Download this Publication (639KB).
  78. G. Roelkens, J. Brouckaert, D. Taillaert, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Heterogeneous integration of InP/InGaAsP photodetectors onto ultracompact Silicon-on-Insulator waveguide circuits,SPIE PhotonicsWest, 6125, p.131-138 (2006)  Download this Publication (3.1MB).
  79. D. Van Thourhout, G. Roelkens, J. Van Campenhout, J. Brouckaert, R. Baets, Technologies for on-chip optical interconnects,Proceedings of the 18th Annual Meeting of the IEEE Lasers & Electro-Optics Society (LEOS 2005), Australia, p.TuE2 (2 pages) (2005)  Download this Publication (977KB).
  80. G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Efficient fiber to SOI photonic wire coupler fabricated using standard CMOS technology,Proceedings of the 18th Annual Meeting of the IEEE Lasers & Electro-Optics Society (LEOS 2005), Australia, p.TuD2 (2005)  Download this Publication (864KB).
  81. D. Van Thourhout, P. Dumon, W. Bogaerts, G. Roelkens, G.R.A. Priem, R. Baets, Recent Progress in SOI Nanophotonic Waveguides,European Conference on Optical Communication (ECOC) 2005 (invited), United Kingdom, p.Tu3.6.2 (2005)  Download this Publication (567KB).
  82. R. Baets, P. Dumon, W. Bogaerts, G. Roelkens, D. Taillaert, B. Luyssaert, G.R.A. Priem, G. Morthier, P. Bienstman, D. Van Thourhout, Silicon-on-insulator based Nano-photonics: Why, How, What for?,Group IV Photonics (invited), Belgium, p.168-170 (2005)  Download this Publication (172KB).
  83. P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, R. Baets, Basic Photonic Wire Components in Silicon-on-Insulator,Group IV Photonics, Belgium, p.189-191 (2005)  Download this Publication (707KB).
  84. G. Roelkens, D. Van Thourhout, I. Christiaens, R. Baets, M.K. Smit, Ultra-thin BCB bonding for heterogeneous integration of III-V devices and SOI photonic components,ECIO 2005, France, (2005)  Download this Publication (802KB).
  85. R. Baets, W. Bogaerts, P. Dumon, G. Roelkens, I. Christiaens, K. De Mesel, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, D. Van Thourhout, Wiaux, Vincent, Wouters, Johan, Beckx, Stefan, Integration of photonic functions in and with Silicon,ESSDERC/ESSCIRC (invited), Belgium, (2004)  Download this Publication (455KB).
  86. G. Roelkens, D. Van Thourhout, R. Baets, Heterogeneous integration of III-V membrane devices and ultracompact SOI waveguides,2004 Digest of the LEOS Summer Topical Meetings , United States, p.23-24 (2004)  Download this Publication (140KB).
      National Conferences

    1. M. Tassaert, D. Van Thourhout, G. Roelkens, Towards a quantum dot mode-locked laser integrated on the Silicon-On-Insulator platform,Doctoraatssymposium, Belgium, (2010)  Download this Publication (87KB).
    2. G. Roelkens, J. Brouckaert, P. Dumon, W. Bogaerts, D. Van Thourhout, Heterogeneous integration of III-V semiconductors and silicon for optical systems-on-a-chip,6th UGent-FirW Doctoraatssymposium, Belgium, p.36 (paper nr. 22) (2005).
    3. J. Brouckaert, G. Roelkens, D. Van Thourhout, Photo-spectrometer based on the integration of InP/InGaAs photodetectors onto a silicon-on-insulator etched diffraction grating,6th UGent-FirW Doctoraatssymposium, Belgium, p.37 (paper nr. 24) (2005)  Download this Publication (259KB).
    4. G. Roelkens, J. Brouckaert, I. Christiaens, K. De Mesel, P. Dumon, D. Van Thourhout, R. Baets, Heterogeneous integration of III-V material and silicon: fabrication and devices,Proceedings Symposium IEEE/LEOS Benelux Chapter, Belgium, p.83-86 (2004)  Download this Publication (142KB).

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