Authors:	J. Schrauwen, J. Van Lysebettens, T. Claes, K. De Vos, P. Bienstman, D. Van Thourhout, R. Baets
Title:	Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators
Format:	International Journal
Publication date:	12/2008
Journal/Conference/Book:	IEEE Photonics Technology Letters
Volume(Issue):	20(23) p.2004
DOI:	10.1109/lpt.2008.2006001
Citations:	21 (Dimensions.ai - last update: 17/11/2024) 16 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract

We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 $mu {hbox{m}}$.

Related Research Topics

• Focused-ion-beam fabrication (2005-2011)

Related Projects

• FWO: Nanostructurering van metalen met Focussed Ion Beam