Abstract
To come up to the demand for extremely sensitive biosensors for parallel real-time bioanalyses, we present several configurations of label-free biosensors on silicon-on-insulator optical chips. We discuss results on a matrix of microring resonators in a microfluidic setup with parallel read-out, the design and fabrication of an integrated surface plasmon resonance interferometer and a fiber-based ringresonator biosensor. The high refractive index contrast material offers submicron-size features with high quality for dense integration, high sensitivity and detection with very low analyte volumes. High throughput fabrication with deep UV lithography allows for mass production of cheap disposable biochips. Related Research Topics
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