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Authors: Peter Verheyen, Guy Lepage, J Van Campenhout, M. Pantouvaki, Philippe Absil, P. De Heyn, W. Bogaerts, P. Dumon, S. Selvaraja
Title: Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform
Format: International Conference Proceedings
Publication date: 4/2012
Journal/Conference/Book: SPIE Photonics Europe 2012
Editor/Publisher: SPIE , 
Volume(Issue): 8431 p.paper 39
Location: Brussels, Belgium
DOI: 10.1117/12.921747
Citations: 8 ( - last update: 7/7/2024)
5 (OpenCitations - last update: 10/5/2024)
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A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow.

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