Authors: | Y. Xing, J. Dong, U. Khan, W. Bogaerts | Title: | Hierarchical Model for Spatial Variations of Integrated Photonics | Format: | International Conference Proceedings | Publication date: | 8/2018 | Journal/Conference/Book: | IEEE International Conference on Group IV Photonics
| Editor/Publisher: | IEEE, | Volume(Issue): | p.91-92 (WD4) | Location: | Cancun, Mexico | DOI: | 10.1109/GROUP4.2018.8478733 | Citations: | 9 (Dimensions.ai - last update: 8/12/2024) 7 (OpenCitations - last update: 27/6/2024) Look up on Google Scholar
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Abstract
The paper presents a hierarchical model that decomposes the spatial process variations of integrated photonics into different levels. We performed an analysis of automated wafer measurements and derived systematic intra-wafer variation and systematic intra-die variation of the wafer. Related Research Topics
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