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Authors: W. Bogaerts, Y. Xing, U. Khan
Title: Layout-Aware Variability Analysis, Yield Prediction and Optimization in Silicon Photonic Circuits
Format: International Journal
Publication date: 9/2019
Journal/Conference/Book: IEEE Journal on Selected Topics in Quantum Electronics
Editor/Publisher: OSA, 
Volume(Issue): 25(5) p.paper 6100413
DOI: 10.1109/JSTQE.2019.2906271
Citations: 46 ( - last update: 9/6/2024)
5 (OpenCitations - last update: 19/4/2024)
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We present a simulation framework for evaluating the effect of location-dependent variability in photonic integrated circuits. The framework combines a fast circuit simulator with circuit layout information and wafer maps of linewidth and layer thickness variations to estimate the statistics of the circuit performance through Monte-Carlo simulations. We illustrate the use of the tool on ring resonator filters, a design sweep of Mach-Zehnder lattice filters, and the tolerance optimization of a Mach-Zehnder interferometer, and show how variability aware design should become an essential part in future photonic circuit design.

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