Authors:	P. Edinger, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, K. Gylfason
Title:	Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics
Format:	International Conference Proceedings
Publication date:	5/2020
Journal/Conference/Book:	Conference on Lasers and Electro-Optics
Volume(Issue):	p.SM3J.2
Location:	San Jose, United States
Online:	https://www.osapublishing.org/abstract.cfm?uri=CLEO_SI-2020-SM3J.2
Citations:	Look up on Google Scholar
Download:	(486KB)

Abstract

MEMS offer low power tunability to silicon photonics. However, reported phase shifters lack in range, IL, or linearity. We show pi linear phase shift in compact, 0.2dB-IL MEMS devices, and demonstrate trade-offs for scalability.

Related Research Topics

• MEMS and NEMS optical actuators in SOI

Related Projects

• H2020: MORPHIC (MEMS-based zerO-power Reconfigurable Photonic ICs)