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H2020MORPHIC

H2020: MORPHIC

Full Name: MEMS-based zerO-power Reconfigurable Photonic ICs

Duration: 1/1/2018-30/6/2021 (Finished)

Partners:

  • imec
  • EPFL
  • KTH
  • Tyndall
  • Commscope
  • VLC Photonics

Objective:

  • Incorporate MEMS technology into silicon photonics
  • Build MEMS-based phase shifters and tunable couplers
  • Integrate these into programmable circuits and subcircuits
  • Packaging technology for large-scale programmable circuits
  • Demonstrate this technology in different applications

INTEC's Role:

  • Project coordination
  • Silicon technology and design kits
  • Circuit architectures
  • Programming algorithms
  • Application demonstrations for beamforming

Project Web site: https://h2020morphic.eu

People involved

Research topics involved

Publications in the framework of this project (88)

    International Journals

  1. J. Zhang, L. Bogaert, C.J. Krückel, E. Soltanian, H. Deng, B. Haq, J.Rimbock, J. Van Kerrebrouck, G. Lepage, P. Verheyen, J. Van Campenhout, P. Ossieur, D. Van Thourhout, G. Morthier, W. Bogaerts, G. Roelkens, Micro-transfer printing InP C-band SOAs on advanced silicon photonics platform for lossless MZI switch fabrics and high-speed integrated transmitters, Optics Express, 31(26), p.42807-42821 (2023)  Download this Publication (11.7MB).
  2. Y. Li, E. Worsey, S. Bleiker, P. Edinger, M. Kulreshath, Q. Tang, A.Y. Takabayashi, N. Quack, P. Verheyen, W. Bogaerts, K.B. Gylfason, D. Pamunuwa, F. Niklaus, Integrated 4-terminal Single-Contact Nanoelectromechanical Relays Implemented in a Silicon-On-Insulator Foundry Process, Nanoscale, 15, p.17335-17341 doi:10.1039/D3NR03429A (2023)  Download this Publication (1.3MB).
  3. N. Quack, A.Y. Takabayashi, H. Sattari, P. Edinger, G. Jo, S.J. Bleiker, C. Errando-Herranz, K.B. Gylfason, F. Niklaus, U. Khan, P. Verheyen, A. Kumar Mallik, J.S. Lee, M. Jezzini, I. Zand, P. Morrissey, C. Antony, P. O'Brien, W. Bogaerts, Integrated Silicon Photonic MEMS , MicroSystems & Nanoengineering, 9, p.27  doi:10.1038/s41378-023-00498-z (2023).
  4. P. Edinger, G. Jo, C.P.V. Nguyen, A.Y. Takabayashi, C. Errando-Herranz, C. Antony, G. Talli, P. Verheyen, U. Khan, S.J. Bleiker, W. Bogaerts, N. Quack, F. Niklaus, K.B Gylfason, A vacuum-sealed silicon photonic MEMS tunable ring resonator with independent control over coupling and phase, Optics Express, doi:10.1364/OE.480219 (2023)  Download this Publication (4.6MB).
  5. H. Sattari, A.Y. Takabayashi, P. Edinger, P. Verheyen, K.B Gylfason, W. Bogaerts, N. Quack, Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process, Journal of Optical Microsystems, 2(4), p.044001 doi:10.1117/1.JOM.2.4.044001 (2022)  Download this Publication (4.4MB).
  6. L. Van Iseghem, E. Picavet, A.Y. Takabayashi, P. Edinger, U. Khan, P. Verheyen, N. Quack , K. B. Gylfason, K. De Buysser, J. Beeckman, W. Bogaerts, Low power optical phase shifter using liquid crystal actuation on silicon photonics platform, Optical Materials Express, 12(6), p.2181-2198 doi:10.1364/OME.457589 (2022)  Download this Publication (49.5MB).
  7. G. Jo, P. Edinger, S. Bleiker, X. Wang, A.Y. Takabayashi, H. Sattari, N. Quack, M. Jezzini, P. Verheyen, I. Zand, U. Khan, W. Bogaerts, G. Stemme, K. B. Gylfason, N. Niklaus, Wafer-level Hermetically Sealed Silicon Photonic MEMS, Photonics Research, 10(2), p.14 doi:10.1364/PRJ.441215 (2022)  Download this Publication (1.6MB).
  8. P. Edinger, A.Y. Takabayashi, C. Errando-Herranz, U. Khan, H. Sattari, P. Verheyen, W. Bogaerts, N. Quack, K.B. Gylfason, Silicon photonic microelectromechanical phase shifters for scalable programmable photonics, Optics Letters, 46(22), p.5671-5674 doi:10.1364/OL.436288 (2021)  Download this Publication (4.7MB).
  9. A.Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack, Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch, Journal of Microelectromechanical Systems, 30(2), p.322-329 doi:10.1109/JMEMS.2021.3060182 (2021)  Download this Publication (2.4MB).
  10. W. Bogaerts, D. Perez, J. Capmany, D.A.B. Miller, J. Poon, D. Englund, F. Morichetti, A. Melloni, Programmable Photonic Circuits, Nature (invited), 586(7828), p.207-216 doi:10.1038/s41586-020-2764-0 (2020).
  11. H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Verheyen, W. Bogaerts, N. Quack, Compact broadband suspended silicon photonic directional coupler, Optics Letters, 45(11), p.2997-3000 doi:10.1364/OL.394470 (2020)  Download this Publication (1MB).
  12. X. Chen, P. Stroobant, M. Pickavet, W. Bogaerts, Graph Representations for Programmable Photonic Circuits, IEEE Journal of Lightwave Technology, 38(15), p.4009-4018 doi:10.1109/JLT.2020.2984990 (2020)  Download this Publication (3.6MB).
  13. W. Bogaerts, A. Rahim, Programmable Photonics: An Opportunity for an Accessible Large-Volume PIC Ecosystem, IEEE Journal on Selected Topics in Quantum Electronics (invited), 26(5), p.8302517 doi:10.1109/JSTQE.2020.2982980 (2020)  Download this Publication (4.5MB).
  14. N. Quack, H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Verheyen, W. Bogaerts, P. Edinger, C. Errando-Herranz, K.B Gylfason, MEMS-enabled Silicon Photonic Integrated Devices and Circuits, Journal of Quantum Electronics (invited), 56(1), p.8400210 doi:10.1109/JQE.2019.2946841 (2020)  Download this Publication (3.6MB).
  15. I. Zand, W. Bogaerts, Effects of Coupling and Phase Imperfections in Programmable Photonic Hexagonal Waveguide Meshes, Photonics Research, 8(2), p.211-218 doi:10.1364/PRJ.376227 (2020)  Download this Publication (2.1MB).
  16. C. Errando-Herranz, N. Le Thomas, K. B. Gylfason, Low-power optical beam steering by microelectromechanical waveguide gratings, Optics Letters, 44(4), United States, doi:10.1364/OL.44.000855 (2019).
      International Conferences

    1. W. Bogaerts, H. Deng, X. Chen, L. Van Iseghem, I. Zand, Y. Zhang, Y. Liu, A. Al Haffar, P. Edinger, G. Jo, A.Y. Takabayashi, C. Antony, A. Mallik Kumar, J. Zhang, E. Soltanian, P. Verheyen, J. Beeckman, G. Roelkens, N. Quack, F. Niklaus, K.B. Gylfason, U. Khan, Building general-purpose programmable photonic chips: opportunities and challenges, SPIE Photonics West - OPTO (invited), 12890, United States, p.12890-55 (2024).
    2. P. Edinger, A.Y. Takabayashi, C. Antony, P. Verheyen, U. Khan, W. Bogaerts, N. Quack, K.B. Gylfason, A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits, Advanced Photonics Congress, p.ITu1A.2 (2 pages) doi:10.1364/IPRSN.2023.ITu1A.2 (2023)  Download this Publication (576KB).
    3. J. Zhang, L. Bogaert, M. Billet, D. Wang, B. Pan, S. Qin, E. Soltanian, S. Cuyvers, D. Maes, T. Vanackere, T. Vandekerckhove, S. Poelman, M. Kiewiet, I. Luntadila Lufungula, X. Guo, H. Li, J. De Witte, G. Lepage, P. Verheyen, J. Van Campenhout, B. Kuyken, G. Morthier, D. Van Thourhout, R. Baets, G. Roelkens, Photonic integrated circuits realized using micro-transfer printing, PIERS (invited), (2023).
    4. Y. Zhang, H. Deng, E. Soltanian, J. Zhang, G. Roelkens, W. Bogaerts, A Nonlinear Activation Function for Optical Neural Networks Using a Mach-Zehnder Interferometer with a III-V-on-Si Amplifier, 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), Germany, doi:10.1109/CLEO/Europe-EQEC57999.2023.10231574 (2023)  Download this Publication (675KB).
    5. K.B. Gylfason, P. Edinger, G. Jo, C.P.V. Nguyen, A.Y. Takabayashi, C. Errando-Herranz, C. Antony, G. Talli, P. Verheyen, U. Khan, S.J. Bleiker, W. Bogaerts, N. Quack, F. Niklaus, Wafer-Level Vacuum-Sealed Low-Power Photonic MEMS for Programmable Silicon Photonic Circuits, IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (invited), South Korea, (2023).
    6. H. Deng, E. Soltanian, J. Zhang, G. Roelkens, W. Bogaerts, Wavelength Converter using Micro Transfer-Printed Optical Amplifiers on a Full SiPh Platform, 2023 IEEE Silicon Photonics Conference (SiPhotonics), United States, doi:10.1109/SiPhotonics55903.2023.10141958 (2023)  Download this Publication (969KB).
    7. U. Khan, I. Zand, L. Van Iseghem, P. Edinger, G. Jo, S. J. Bleiker, A. Y. Takabayashi, C. Antony, M. Jezzini, G. Talli, H. Sattari, J. Lee, A. K. Mallik, P. Verheyen, C. Lerma Arce, M. Garcia, T. Jonuzi, E. Picavet, K. Nagarjun, J. Watte, N. Quack, F. Niklaus, K. De Buysser, J. Beekman, W. Bogaerts, Low power actuators for programmable photonic processors, SPIE Photonics West OPTO (invited), 12438, United States, p.124380K  doi:10.1117/12.2647371 (2023)  Download this Publication (31.6MB).
    8. W. Bogaerts, K. Nagarjun, L. Van Iseghem, X. Chen, H. Deng, I. Zand, Y. Zhang, Y. Liu, A.Y. Takabayashi, H. Sattari, N. Quack, P. Edinger, G. Jo, S.J. Bleiker, K.B. Gylfason, F. Niklaus, A. Kumar Mallik, M. Jezzini, C. Antony, G. Talli, P. Verheyen, J. Beeckman, U. Khan, Scaling Programmable Silicon Photonic Circuits, SPIE Photonics West OPTO (invited), 12426, United States, p.12426-1 doi:10.1117/12.2647293 (2023)  Download this Publication (31.4MB).
    9. K.B. Gylfason, P. Edinger, G. Jo, C.P.V. Nguyen, A.Y. Takabayashi, C. Errando-Herranz, C. Antony, G. Talli, P. Verheyen, U. Khan, S.J. Bleiker, W. Bogaerts, N. Quack, F. Niklaus, Wafer-Level Vacuum-Sealed Low-Power Photonic MEMS for High Density Silicon Photonic Circuits, IEEE Photonics Global Conference (invited), Sweden, (2022).
    10. W. Bogaerts, Silicon Photonic Devices for Programmable Linear Circuitry, European Conference on Optical Communication (invited), Switzerland, (2022).
    11. N. Quack, A.Y. Takabayashi, H. Sattari, P. Edinger, G. Jo, Simon J. Bleiker, C. Errando-Herranz, K.B. Gylfason, F. Niklaus, U. Khan, P. Verheyen, A. Kumar Mallik, J.S. Lee, M. Jezzini, G. Talli, C. Antony, P. O'Brien, W. Bogaerts, Silicon Photonic MEMS for Efficient Scaling of Programmable Integrated Optics, Micro and Nano Engineering (invited), Belgium, (2022).
    12. W. Bogaerts, A.Y. Takabayashi, P. Edinger, G. Jo, A.K. Mallik, C. Antony, I. Zand, T. Jonuzi, X. Chen, H. Sattari, J.S. Lee, M.A. Jezzini, G. Talli, C. Lerma Arce, S. Kumar, P. Verheyen, N. Quack, K.B. Gylfason, F. Niklaus, U. Khan, Programmable Photonic Circuits Powered by Silicon Photonic MEMS Technology, Advanced Photonics Congress - NETWORKS, Netherlands, p.NeM2C.3  doi:10.1364/NETWORKS.2022.NeM2C.3 (2022)  Download this Publication (4MB).
    13. H. Deng, W. Bogaerts, Configurable Modulator based Optical Carrier Frequency Suppressed Intensity Modulation, IEEE Photonics Society Summer Topicals, Mexico, p.MB2.3 doi:10.1109/SUM53465.2022.9858295 (2022)  Download this Publication (951KB).
    14. L. Van Iseghem, U. Khan, E. Picavet, A.Y. Takabayashi, P. Verheyen, N. Quack, K. De Buysser, J. Beeckman, W. Bogaerts, Low power phase shifter using liquid crystal on an integrated silicon photonics platform, IEEE Photonics Society Summer Topicals (invited), Mexico, p.MB2.1 doi:10.1109/SUM53465.2022.9858217 (2022)  Download this Publication (2.9MB).
    15. I. Zand, C. Antony, X. Chen, W. Bogaerts, Software Framework Architecture for Programmable Photonic Chips, IEEE Photonics Society Summer Topicals, Mexico, p.WB1.3 doi:10.1109/SUM53465.2022.9858236 (2022)  Download this Publication (1.1MB).
    16. W. Bogaerts, X. Chen, H. Deng, L. Van Iseghem, M. Wang, I. Zand, Y. Zhang, Y. Liu, K. Nagarjun, U. Khan, Programmable Silicon Photonic Circuits, OptoElectronics and Communication Conference / International Conference on Photonics in Switching and Computing (OECC / PSC) (invited), Japan, p.TuE4-1  doi:10.23919/OECC/PSC53152.2022.9849952 (2022)  Download this Publication (736KB).
    17. L. Van Iseghem, U. Khan, E. Picavet, A. Y. Takabayashi, P. Verheyen, N. Quack, K. De Buysser, J. Beeckman, W. Bogaerts, Low voltage tuning of ring resonator on a silicon photonics platform with local liquid crystal deposition, International Conference on Optical, Optoelectronic and Photonic Materials and Applications, (2022).
    18. P. Edinger, A.Y. Takabayashi, U. Khan, C. Antony, G. Talli, P. Verheyen, W. Bogaerts, N. Quack, K.B. Gylfason, Low-power micro-electro-mechanical ring resonators on IMEC, ePIXfab Silicon Photonics Summer School, France, (2022)  Download this Publication (10MB).
    19. U. Khan, I. Zand, P. Edinger, G. Jo, S. Bleiker, A. Y. Takabayashi, C. Antony, J. Lee, A. Kumar, P. Verheyen, C. Lerma Arce, T. Jonuzi, J. Watte, N. Quack, F. Niklaus, K. Gylfason, W. Bogaerts, Large scale programmable photonic circuits using silicon photonic MEMS, Conference on Lasers and Electro-Optics (invited), United States, p.AM2C.5 doi:10.1364/CLEO_AT.2022.AM2C.5 (2022)  Download this Publication (2MB).
    20. P. Edinger, C.P.V. Nguyen, A.Y. Takabayashi, C. Antony, G. Talli, P. Verheyen, U. Khan, W. Bogaerts, N. Quack, K.B. Gylfason, Add-drop silicon ring resonator with low-power MEMS tuning of phase and coupling, Conference on Lasers and Electro-Optics, United States, p.SF4M.5 doi:10.1364/CLEO_SI.2022.SF4M.5 (2022)  Download this Publication (1013KB).
    21. W. Bogaerts, Does the world need general-purpose programmable photonics?, European Conference on Integrated Optics (invited), Italy, p.F.E.1 (2022)  Download this Publication (1.5MB).
    22. W. Bogaerts, L. Van Iseghem, X. Chen, I. Zand, H. Deng, M. Wang, K.P. Nagarjun, U. Khan, Technologies for large-scale programmable photonic circuits, Progress in Electromagnetic Research (PIERS) (invited), China, (2022).
    23. U. Khan, I. Zand, P. Edinger, G. Jo, S. Bleiker, A. Y. Takabayashi, C. Antony, M. Jezzini, G. Talli, H. Sattari, J. Lee, A. Kumar, P. Verheyen, S. Kumar, C. Lerma Arce, M. Garcia, T. Jonuzi, J. Watte, N. Quack, F. Niklaus, K. Gylfason, W. Bogaerts, MORPHIC: MEMS enhanced silicon photonics for programmable circuits, SPIE Photonics Europe 2022, Proc. SPIE (invited), 121480, France, p.121480H doi:10.1117/12.2631231 (2022)  Download this Publication (44.7MB).
    24. J. Zhang, E. Soltanian, B. Haq, S. Ertl, J. Rimboeck, B. Matuskova, E. Pelucchi, A. Gocalinska, J. Van Campenhout, G. Lepage, P. Verheyen, W. Bogaerts, G. Roelkens, Integrated optical transmitter with micro-transfer-printed widely tunable III-V-on-Si laser, Optical Fiber Communication Conference, p.Tu2D.2 doi:10.1364/OFC.2022.Tu2D.2 (2022)  Download this Publication (1.8MB).
    25. M. Glick, W. Bogaerts, J. Capmany, J. Poon, Panel: Programmable Photonic Chips for Artificial Intelligence, Computing and Optical Networks, Optical Fiber Communication Conference, United States, p.M3B (2022)  Download this Publication (167KB).
    26. W. Bogaerts, A.Y. Takabayashi, P. Edinger, G. Jo, I. Zand, P. Verheyen, M. Jezzini, H. Sattari, G. Talli, C. Antony, M. Saei, C. Lerma-Arce, J. Lee, S. Kumar, M. Garcia, T. Jonuzi, K.B. Gylfason, N. Quack, F. Niklaus, U. Khan, Programmable Silicon Photonic Circuits powered by MEMS, SPIE Photonics West OPTO (invited), 12005, United States, p.12005-21 doi:10.1117/12.2614213 (2022)  Download this Publication (36.7MB).
    27. P. Edinger, A.Y. Takabayashi, C. Errando-Herranz, U. Khan, C. Antony, G. Talli, P. Verheyen, W. Bogaerts, N. Quack, K.B. Gylfason, A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits, 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), Japan, p.995-997 doi:10.1109/MEMS51670.2022.9699739 (2022)  Download this Publication (4.4MB).
    28. A.Y. Takabayashi, D. Silva, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack, Compact Integrated Silicon Photonic Mems Power Coupler for Programmable Photonics, 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), Japan, p.216-219 doi:10.1109/MEMS51670.2022.9699708 (2022)  Download this Publication (5.7MB).
    29. W. Bogaerts, L. Van Iseghem, X. Chen, I. Zand, H. Deng, M. Wang, Y. Zhang, Y. Liu, K.P. Nagarjun, U. Khan, Programmable Silicon Photonic Circuits, International Symposium on Photonic and Electronic Convergence (ISPEC 2021) (invited), (2021).
    30. K. Rajendran, A. Pandey, P. Edinger, G. Jo, A.Y. Takabayashi, U. Khan, P. Verheyen, N. Quack, F. Niklaus, W. Bogaerts, K. Gylfason, D. Van Thourhout, Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform, IEEE International Conference on Group IV Photonics, doi:10.1109/GFP51802.2021.9673877 (2021)  Download this Publication (1.6MB).
    31. K. Rajendran, A. Pandey, A.Y. Takabayash, U. Khan, W. Bogaerts, N. Quack, D. Van Thourhout, Forward Stimulated Brillouin Scattering in Free-Standing Waveguides on a Silicon Photonics Platform, Frontiers in Optics, doi:10.1364/FIO.2021.FTu6B.3 (2021)  Download this Publication (512KB).
    32. N. Quack, A.Y. Takabayashi, H. Sattari, P. Edinger, K.B. Gylfason, G. Jo, F. Niklaus, P. Verheyen, M. Jezzini, U. Khan, I. Zand, W. Bogaerts, Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics, IEEE Photonics Conference (invited), doi:10.1109/IPC48725.2021.9593009 (2021)  Download this Publication (486KB).
    33. W. Bogaerts, L. Van Iseghem, M. Wang, H. Deng, X. Chen, I. Zand, K.P. Nagarjun, U. Khan, Programmable Photonic Circuits, SPIE Photonex (invited), United Kingdom, doi:10.1117/12.2600687 (2021).
    34. W. Bogaerts, L. Van Iseghem, M. Wang, H. Deng, I. Zand, X. Chen, K.P. Nagarjun, U. Khan, Programmable Silicon Photonics, International Conference on Solid State Devices and Materials (SSDM) (invited), p.E-2_01 (2021)  Download this Publication (1.1MB).
    35. W. Bogaerts, A.Y. Takabayashi, P. Edinger, I. Zand, G. Jo, H. Sattari, P. Verheyen, M.A. Jezzini, C. Antony, G. Talli, M. Saei, S. Kumar, C. Lerma Arce, M. Garcia Porcel, N. Quack, K.B. Gylfason, F. Niklaus, U. Khan, Programmable Photonic Circuits using Silicon Photonic MEMS, Advanced Photonics Congress (invited), p.IM2A.1 doi:10.1364/IPRSN.2021.IM2A.1 (2021)  Download this Publication (1.1MB).
    36. W. Bogaerts, M. Wang, X. Chen, H. Deng, I. Zand, L. Van Iseghem, K.P. Nagarjun, U. Khan, General-Purpose Programmable Photonic Chips, IEEE Photonics Society Summer Topicals (invited), p.WB2.1 doi:10.1109/SUM48717.2021.9505805 (2021)  Download this Publication (1.7MB).
    37. A.Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack, Continuously tunable Silicon Photonic MEMS 2x2 Power Coupler, 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers),, p.B5-5B6 doi:10.1109/Transducers50396.2021.9495551 (2021)  Download this Publication (5.6MB).
    38. W. Bogaerts, Tutorial: Programmable Photonics, Optical Fiber Communication Conference (invited), p.Tu1K.1 (2021)  Download this Publication (16.4MB).
    39. P. Edinger, K. Kristinsson, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, K.B. Gylfason, Silicon photonic MEMS phase shifter with us time constant built on a foundry platform , Conference on Lasers and Electro-Optics, p.STu2Q.1 doi:10.1364/CLEO_SI.2021.STu2Q.1 (2021)  Download this Publication (1.1MB).
    40. W. Bogaerts, L. Van Iseghem, P. Edinger, H. Sattari, A.Y. Takabayashi, X. Chen, H. Deng, P. Verheyen, A. Ribeiro, U. Khan, N. Quack, K.B. Gylfason, Low-Power Electro-Optic Actuators for Large-Scale Programmable Photonic Circuits, Conference on Lasers and Electro-Optics (invited), p.STh1Q.4 doi:10.1364/CLEO_SI.2021.STh1Q.4 (2021)  Download this Publication (2MB).
    41. K.B. Gylfason, P. Edinger, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, Compact and low power silicon photonic components based on MEMS, SPIE Photonics West OPTO (invited), 11697, p.116970Y doi:10.1117/12.2582947 (2021).
    42. G. Jo, P. Edinger, S. Bleiker, X. Wang, A.Y.Takabayashi, H. Sattari, N. Quack, M. Jezzini, P. Verheyen, G. Stemme, W. Bogaerts, K.B. Gylfason, F. Niklaus, Wafer-level vacuum sealing for packaging of silicon photonic MEMS, SPIE Photonics West OPTO, 11691, p.116910E doi:10.1117/12.2582975 (2021)  Download this Publication (906KB).
    43. W. Bogaerts, Programmable Photonic Circuits for Linear Processing, Design, Automation and Test in Europe (DATE2021), p.11.2.2 (2021).
    44. H. Sattari, A.Y. Takabayashi, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack, Low-Voltage Silicon Photonic MEMS Switch with Vertical Actuation, International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021) , doi:10.1109/MEMS51782.2021.9375168 (2021)  Download this Publication (1.1MB).
    45. W. Bogaerts, X. Chen, I. Zand, M. Wang, H. Deng, L. Van Iseghem, A. Rahim, U. Khan, Tutorial: Programmable Integrated Photonics, European Conference on Optical Communication (ECOC) (invited), p.paper Tu4B-1 (3 pages) doi:10.1109/ECOC48923.2020.9333192 (2020)  Download this Publication (611KB).
    46. H. Sattari, A.Y. Takabayashi, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack, Silicon Photonic MEMS Add-Drop Filter, European Conference on Optical Communication (ECOC), Belgium, p.paper Tu2B-2 (3 pages) doi:10.1109/ECOC48923.2020.9333392 (2020)  Download this Publication (1.4MB).
    47. W. Bogaerts, X. Chen, M. Wang, I. Zand, H. Deng, L. Van Iseghem, A. Ribeiro, A. Diaz Tormo , U. Khan, Programmable Silicon Photonic Integrated Circuits, IEEE Photonics Conference (IPC) (invited), Canada, p.ThD2.1 doi:10.1109/IPC47351.2020.9252475 (2020)  Download this Publication (2.4MB).
    48. W. Bogaerts, A. Rahim, X. Chen, L. Van Iseghem, H. Deng, M. Wang, I. Zand, A. Ribeiro, A. Diaz Tormo , U. Khan, Programmable Photonic Circuits: a flexible way of manipulating light on chips, Frontiers in Optics (invited), United States, doi:10.1364/FIO.2020.FTh1C.1 (2020)  Download this Publication (1.7MB).
    49. W. Bogaerts, Programmable Photonic Circuits, IC Industry Development Summit Forum (invited), China, (2020)  Download this Publication (237KB).
    50. W. Bogaerts, P. Edinger, A.Y. Takabayashi, I. Zand, X. Chen, H. Sattari, P. Verheyen, M. Jezzini, G. Talli, S. Kumar, M. Garcia-Porcel, A. Ribeiro, G. Jo, N. Quack, K. Gylfason, F. Niklaus, U. Khan, Building Large-Scale Programmable Photonic Circuits Using Silicon Photonics MEMS, OSA Advanced Photonics Congress - Photonics in Switching and Computing (invited), Canada, p.PsTh1F.1 doi:10.1364/PSC.2020.PsTh1F.1 (2020)  Download this Publication (663KB).
    51. I. Zand, X. Chen, W. Bogaerts, Application-specific Scaling in Programmable Photonic Circuits, European Conference on Integrated Optics, France, p.10.3 (2020)  Download this Publication (1.6MB).
    52. A.Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack, Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch, European Conference on Integrated Optics, p.10.1 (2020)  Download this Publication (492KB).
    53. L. Van Iseghem, U. Khan, P. Edinger, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, K.B. Gylfason, N. Quack, J. Beeckman, W. Bogaerts, Liquid crystal phase shifter integrated in a silicon photonics platform, European Conference on Integrated Optics, p.1.3 (2020)  Download this Publication (1.8MB).
    54. P. Edinger, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, K. Gylfason, Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics, Conference on Lasers and Electro-Optics, United States, p.SM3J.2 (2020)  Download this Publication (486KB).
    55. W. Bogaerts, H. Sattari, P. Edinger, A. Takabayashi, I. Zand, X. Wang, A. Ribeiro, M. Jezzini, C. Errando-Herranz, G. Talli, C. Lerma Arce, S. Kumar, M. Garcia, P. Verheyen, B. Abasahl, F. Niklaus, N. Quack, K. Gylfason, P. O'Brien, U. Khan, MORPHIC: Programmable Photonic Circuits enabled by Silicon Photonic MEMS, SPIE Photonics West - OPTO (invited), 11285, United States, p.1128503 doi:10.1117/12.2540934 (2020)  Download this Publication (11.6MB).
    56. W. Bogaerts, A. Ribeiro, M. Wang, L. Van Iseghem, H. Deng, I. Zand, X. Chen, U. Khan, Technologies for large-scale programmable photonic circuits, AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019 (invited), p.11200-55 (2019).
    57. X. Chen, W. Bogaerts, Building Graph-based Programming Strategies for Reconfigurable Photonic Circuits, Annual Symposium of the IEEE Photonics Society Benelux Chapter, Netherlands, p.1-4 (2019).
    58. I. Zand, B. Abasahl, W. Bogaerts, Intensity Spread Analysis of Programmable Photonic Circuits with Parasitics, IEEE Photonics Society Summer Topicals, United States, p.paper TuE2.2 doi:10.1109/PHOSST.2019.8794953 (2019)  Download this Publication (646KB).
    59. I. Zand, W. Bogaerts, Discretization Effects of Digital Control of Thermally Tunable 2x2 MZI Couplers, IEEE Photonics Society Summer Topicals, United States, p.paper TuE2.2 (2 pages) doi:10.1109/PHOSST.2019.8794890 (2019)  Download this Publication (398KB).
    60. W. Bogaerts, D.A.B. Miller, J. Capmany, The New World of Programmable Photonics, IEEE Photonics Society Summer Topicals (invited), United States, p.ME1.1 doi:10.1109/PHOSST.2019.8795032 (2019)  Download this Publication (3.6MB).
    61. X. Chen, W. Bogaerts, A Graph-based Design and Programming Strategy for Reconfigurable Photonic Circuits, IEEE Photonics Society Summer Topical Meeting Series (SUM) , United States, p.paper ME2.2 (2 pages) doi:10.1109/PHOSST.2019.8795068 (2019)  Download this Publication (1.6MB).
    62. U. Khan, B. Abasahl, I. Zand, N. Quack, K. Gylfason, M. Jezzini, H. Y. Hwang, M. A. G. Porcel, C. Lerma Arce, S. Kumar, W. Bogaerts, Generic Platform for Silicon Photonics based on MEMS Reconfigurable Photonic Integrated Circuits, Photonics & Electromagnetics Research Symposium (PIERS) 2019 (invited), Italy, p.2271 (2019)  Download this Publication (557KB).
    63. B. Abasahl, W. Bogaerts, Evaluation of Stability of Silicon-Photonics-Based Optical Switch Network Architectures against Parasitic Errors in Switch Elements, 21st European Conference on Integratred Optics (ECIO 2019), Belgium, p.Po1.1 (2019)  Download this Publication (925KB).
    64. N. Quack, H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Edinger, C. Errando-Herranz, K. Gylfason, X. Wang, F. Niklaus, M. A. Jezzini, H.Y. Hwang, P. O'Brien, M.A.G. Porcel, C. Lerma Arce, S. Kumar, B. Abasahl, P. Verheyen, W. Bogaerts, Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits, Optical Fiber Communication Conference (invited), United States, p.M2D.3 doi:10.1364/ofc.2019.m2d.3 (2019)  Download this Publication (447KB).
    65. B. Abasahl, I. Zand, C. Lerma Arce, S. Kumar, N. Quack, M. A. Jezzini, H. Y. Hwang, K. Gylfason, M. A. G. Porcel, W. Bogaerts, Towards Low-Power Reconfigurable Photonic ICs Based on MEMS Technology, Australian Institute of Physics Congress (invited), Australia, (2018).
    66. I. Zand, B. Abasahl, U. Khan, W. Bogaerts, Controlling parasitics in linear optical processors, Proceedings of the 23rd Annual Symposium of the IEEE Photonics Benelux Chapter, Belgium, p.152-155 (2018)  Download this Publication (894KB).
    67. U. Khan, W. Bogaerts, N. Quack, K.B. Gylfason , P. Verheyen, P. O'Brien, C.L. Arce, M. Garcia, The MORPHIC Project: Enabling large scale programmable photonic circuits using MEMS, Photonics Ireland Conference 2018 (invited), Ireland, p.We.J1.3 (2018)  Download this Publication (859KB).
    68. W. Bogaerts, Large-scale Programmable Silicon Photonics, European Conference on Integrated Optics (invited), 2018, Spain, p.We.3.A.1 (2018)  Download this Publication (318KB).
    69. W. Bogaerts, Programmable photonic ICs: making optical devices more versatile, PIC International Conference (invited), Belgium, (2018)  Download this Publication (6.6MB).