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Full Name:MEMS-based Zero-power Reprogrammable Photonic ICs

Duration: 1/1/2018-30/6/2021


  • imec
  • EPFL
  • KTH
  • Tyndall
  • Commscope
  • VLC Photonics


  • Incorporate MEMS technology into silicon photonics
  • Build MEMS-based phase shifters and tunable couplers
  • Integrate these into programmable circuits and subcircuits
  • Packaging technology for large-scale programmable circuits
  • Demonstrate this technology in different applications

INTEC's Role:

  • Project coordination
  • Silicon technology and design kits
  • Circuit architectures
  • Programming algorithms
  • Application demonstrations for beamforming

Project Web site:

People involved

Research topics involved

Publications in the framework of this project (28)

    International Journals

  1. H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Verheyen, W. Bogaerts, N. Quack, Compact suspended Silicon Photonic directional coupler, Optics Letters, 45(11), p.2997-3000 doi:10.1364/OL.394470 (2020)  Download this Publication (1MB).
  2. X. Chen, P. Stroobant, M. Pickavet, W. Bogaerts, Graph Representations for Programmable Photonic Circuits, IEEE Journal of Lightwave Technology, 38(15), p.4009-4018 doi:10.1109/JLT.2020.2984990 (2020)  Download this Publication (3.6MB).
  3. W. Bogaerts, A. Rahim, Programmable Photonics: An Opportunity for an Accessible Large-Volume PIC Ecosystem, IEEE Journal on Selected Topics in Quantum Electronics (invited), 26(5), p.8302517 doi:10.1109/JSTQE.2020.2982980 (2020)  Download this Publication (4.5MB).
  4. N. Quack, H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Verheyen, W. Bogaerts, P. Edinger, C. Errando-Herranz, K.B Gylfason, MEMS-enabled Silicon Photonic Integrated Devices and Circuits, Journal of Quantum Electronics (invited), 56(1), p.8400210 doi:10.1109/JQE.2019.2946841 (2020)  Download this Publication (3.6MB).
  5. I. Zand, W. Bogaerts, Effects of Coupling and Phase Imperfections in Programmable Photonic Hexagonal Waveguide Meshes, Photonics Research, 8(2), p.211-218 doi:10.1364/PRJ.376227 (2020)  Download this Publication (2.1MB).
  6. C. Errando-Herranz, N. Le Thomas, K. B. Gylfason, Low-power optical beam steering by microelectromechanical waveguide gratings, Optics Letters, 44(4), United States, doi:10.1364/OL.44.000855 (2019).
      International Conferences

    1. W. Bogaerts, P. Edinger, A.Y. Takabayashi, I. Zand, X. Chen, H. Sattari, P. Verheyen, M. Jezzini, G. Talli, S. Kumar, M. Garcia-Porcel, A. Ribeiro, G. Jo, N. Quack, K. Gylfason, F. Niklaus, U. Khan, Building Large-Scale Programmable PhotonicCircuits Using Silicon Photonics MEMS, OSA Advanced Photonics Congress - Photonics in Switching and Computing (invited), Canada, p.PsTh1F.1 (2020).
    2. I. Zand, X. Chen, W. Bogaerts, Application-specific Scaling in Programmable Photonic Circuits, European Conference on Integrated Optics, p.10.3 (2020)  Download this Publication (1.6MB).
    3. A.Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack, Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch, European Conference on Integrated Optics, p.10.1 (2020)  Download this Publication (492KB).
    4. L. Van Iseghem, U. Khan, P. Edinger, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, K.B. Gylfason, N. Quack, J. Beeckman, W. Bogaerts, Liquid crystal phase shifter integrated in a silicon photonics platform, European Conference on Integrated Optics, p.1.3 (2020)  Download this Publication (1.8MB).
    5. P. Edinger, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, K. Gylfason, Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics, Conference on Lasers and Electro-Optics, United States, p.SM3J.2 (2020)  Download this Publication (431KB).
    6. W. Bogaerts, H. Sattari, P. Edinger, A. Takabayashi, I. Zand, X. Wang, A. Ribeiro, M. Jezzini, C. Errando-Herranz, G. Talli, C. Lerma Arce, S. Kumar, M. Garcia, P. Verheyen, B. Abasahl, F. Niklaus, N. Quack, K. Gylfason, P. O'Brien, U. Khan, MORPHIC: Programmable Photonic Circuits enabled by Silicon Photonic MEMS, SPIE Photonics West - OPTO (invited), 11285, United States, p.1128503 doi:10.1117/12.2540934 (2020)  Download this Publication (11.6MB).
    7. W. Bogaerts, A. Ribeiro, M. Wang, L. Van Iseghem, H. Deng, I. Zand, X. Chen, U. Khan, Technologies for large-scale programmable photonic circuits, AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019 (invited), p.11200-55 (2019).
    8. X. Chen, W. Bogaerts, Building Graph-based Programming Strategies for Reconfigurable Photonic Circuits, Annual Symposium of the IEEE Photonics Society Benelux Chapter, Netherlands, p.1-4 (2019).
    9. I. Zand, B. Abasahl, W. Bogaerts, Intensity Spread Analysis of Programmable Photonic Circuits with Parasitics, IEEE Photonics Society Summer Topicals, United States, p.paper TuE2.2 doi:10.1109/PHOSST.2019.8794953 (2019)  Download this Publication (646KB).
    10. X. Chen, W. Bogaerts, A Graph-based Design and Programming Strategy for Reconfigurable Photonic Circuits, IEEE Photonics Society Summer Topical Meeting Series (SUM) , United States, p.paper ME2.2 (2 pages) doi:10.1109/PHOSST.2019.8795068 (2019)  Download this Publication (1.6MB).
    11. I. Zand, W. Bogaerts, Discretization Effects of Digital Control of Thermally Tunable 2x2 MZI Couplers, IEEE Photonics Society Summer Topicals, United States, p.paper TuE2.2 (2 pages) doi:10.1109/PHOSST.2019.8794890 (2019)  Download this Publication (398KB).
    12. W. Bogaerts, D.A.B. Miller, J. Capmany, The New World of Programmable Photonics, IEEE Photonics Society Summer Topicals (invited), United States, p.ME1.1 doi:10.1109/PHOSST.2019.8795032 (2019)  Download this Publication (3.6MB).
    13. U. Khan, B. Abasahl, I. Zand, N. Quack, K. Gylfason, M. Jezzini, H. Y. Hwang, M. A. G. Porcel, C. Lerma Arce, S. Kumar, W. Bogaerts, Generic Platform for Silicon Photonics based on MEMS Reconfigurable Photonic Integrated Circuits, Photonics & Electromagnetics Research Symposium (PIERS) 2019 (invited), Italy, p.2271 (2019)  Download this Publication (557KB).
    14. B. Abasahl, W. Bogaerts, Evaluation of Stability of Silicon-Photonics-Based Optical Switch Network Architectures against Parasitic Errors in Switch Elements, 21st European Conference on Integratred Optics (ECIO 2019), Belgium, p.Po1.1 (2019)  Download this Publication (925KB).
    15. N. Quack, H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Edinger, C. Errando-Herranz, K. Gylfason, X. Wang, F. Niklaus, M. A. Jezzini, H.Y. Hwang, P. O'Brien, M.A.G. Porcel, C. Lerma Arce, S. Kumar, B. Abasahl, P. Verheyen, W. Bogaerts, Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits, Optical Fiber Communication Conference (invited), United States, p.M2D.3 doi:10.1364/ofc.2019.m2d.3 (2019)  Download this Publication (447KB).
    16. B. Abasahl, I. Zand, C. Lerma Arce, S. Kumar, N. Quack, M. A. Jezzini, H. Y. Hwang, K. Gylfason, M. A. G. Porcel, W. Bogaerts, Towards Low-Power Reconfigurable Photonic ICs Based on MEMS Technology, Australian Institute of Physics Congress (invited), Australia, (2018).
    17. I. Zand, B. Abasahl, U. Khan, W. Bogaerts, Controlling parasitics in linear optical processors, Proceedings of the 23rd Annual Symposium of the IEEE Photonics Benelux Chapter, Belgium, p.152-155 (2018)  Download this Publication (894KB).
    18. U. Khan, W. Bogaerts, N. Quack, K.B. Gylfason , P. Verheyen, P. O'Brien, C.L. Arce, M. Garcia, The MORPHIC Project: Enabling large scale programmable photonic circuits using MEMS, Photonics Ireland Conference 2018 (invited), Ireland, p.We.J1.3 (2018)  Download this Publication (859KB).
    19. W. Bogaerts, Large-scale Programmable Silicon Photonics, European Conference on Integrated Optics (invited), 2018, Spain, p.We.3.A.1 (2018)  Download this Publication (318KB).
    20. W. Bogaerts, Programmable photonic ICs: making optical devices more versatile, PIC International Conference (invited), Belgium, (2018)  Download this Publication (6.6MB).

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