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Authors: A.Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack
Title: Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch
Format: International Conference Proceedings
Publication date: 6/2020
Journal/Conference/Book: European Conference on Integrated Optics
Volume(Issue): p.10.1
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We demonstrate a photonic Single-Pole Double-Throw (SPDT) switch based on electrostatically actuated MEMS waveguides implemented in IMEC’s ISiPP50G silicon photonics platform with custom MEMS release post-processing. An average Extinction Ratio (ER) > 23 dB is maintained over a 70 nm bandwidth with a peak ER
of 25 dB at 1550 nm while an actuation voltage of 22 V is applied to the curved electrode electrostatic actuator of the device. A compact footprint of 30 um x 60 um and a low Insertion Loss (IL) allow for device integration in larger switch networks

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