Authors:	A.Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack
Title:	Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch
Format:	International Conference Proceedings
Publication date:	6/2020
Journal/Conference/Book:	European Conference on Integrated Optics
Volume(Issue):	p.10.1
Online:	https://www.ecio-conference.org/wp-content/uploads/2020/06/10-Alain-Takabayashi-Broadband-Compact-Single-Pole-Double-Throw-Silicon-Photonic-MEMS-Switch-ECIO-2020.pdf
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Abstract

We demonstrate a photonic Single-Pole Double-Throw (SPDT) switch based on electrostatically actuated MEMS waveguides implemented in IMEC’s ISiPP50G silicon photonics platform with custom MEMS release post-processing. An average Extinction Ratio (ER) > 23 dB is maintained over a 70 nm bandwidth with a peak ER
of 25 dB at 1550 nm while an actuation voltage of 22 V is applied to the curved electrode electrostatic actuator of the device. A compact footprint of 30 um x 60 um and a low Insertion Loss (IL) allow for device integration in larger switch networks

Related Research Topics

• MEMS and NEMS optical actuators in SOI

Related Projects

• H2020: MORPHIC (MEMS-based zerO-power Reconfigurable Photonic ICs)