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Authors: A.Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack
Title: Continuously tunable Silicon Photonic MEMS 2x2 Power Coupler
Format: International Conference Proceedings
Publication date: 6/2021
Journal/Conference/Book: 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers),
Volume(Issue): p.B5-5B6
DOI: 10.1109/Transducers50396.2021.9495551
Citations: 1 ( - last update: 26/11/2023)
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The integration of MEMS transducers in photonic integrated circuits provides opportunities for high efficiency photonic modulation and dynamic routing on-chip. We here present an electrostatically actuated, silicon photonic MEMS 2x2 power coupler, fabricated in IMEC's iSiPP50G platform followed by a dedicated MEMS release sequence. The in-plane, mechanical tuning mechanism provides analog power coupling between waveguides in a small form factor. With our experimental demonstration of broad, > 30 nm optical bandwidth, high extinction ratio of > 27 dB, and a low actuation voltage of only 6 V, the coupler fulfills the requirements for large-scale integration in next generation reconfigurable PICs.

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