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Authors: D. Maes, G. Roelkens, M. Zaknoune, C. Op de Beeck, S. Poelman, M. Billet, M. Muneeb, S. Lemey, E. Peytavit, B. Kuyken
Title: Heterogeneous integration of uni-travelling-carrier photodiodes using micro-transfer-printing on a silicon-nitride platform
Format: International Conference Proceedings
Publication date: 6/2021
Journal/Conference/Book: 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO Europe-EQEC)
Volume(Issue): p.paper CK-4.3 THU
Location: Munich, Germany (Virtual presentation)
DOI: 10.1109/CLEO/Europe-EQEC52157.2021.9542787
Citations: 4 ( - last update: 14/7/2024)
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High-speed photodiodes often compromise responsivity in exchange for a reduced footprint. However, using waveguide photodiodes circumvents this limitation [1] . We combine uni-travelling-carrier photodiodes (UTC PDs) on a silicon nitride (SiN) photonic platform to achieve both high responsivity and high speed detectors. The SiN-platform has excellent properties such as low-loss waveguides and does not suffer from two-foton absorption at high optical power. A high responsivity is obtained through evanescent coupling of waveguide UTC photodiodes to SiN waveguides while still maintaining a small footprint.

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