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Authors: Z. Liu, G. Muliuk, J. Zhang, G. Roelkens, N. Le Thomas, R. Baets
Title: Micro-transfer printed silicon nitride grating couplers for efficient on-chip light coupling
Format: International Conference Proceedings
Publication date: 3/2022
Journal/Conference/Book: SPIE Photonics West
Volume(Issue): p.12004-75
Location: San Francisco, United States
Citations: Look up on Google Scholar
Download: Download this Publication (15.1MB) (15.1MB)


We demonstrate a new post-processing approach to efficiently couple light in silicon nitride (Si3N4) photonic integrated circuits (PIC) via grating couplers. Thin-film coupons of apodised Si3N4 grating couplers functionalized with metallic bottom reflectors and adiabatic couplers are micro-transfer printed onto the input and output of Si3N4 waveguides, providing efficient coupling without jeopardizing the rest of the PIC. Two-dimensional FDTD simulations predict coupling efficiencies as large as 70% (-1.5dB) at a wavelength of 785nm. As a proof-of-concept, we report an experimental coupling efficiency of -4.6dB, which is 2.6dB better than the values obtained with standard designs of grating couplers.

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