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Authors: P. Dumon, W. Bogaerts, D. Van Thourhout, V. Wiaux, J. Wouters, S. Beckx, R. Baets
Title: WDM filters in Silicon-on-insulator photonic wires
Format: National Conference Poster
Publication date: 12/2004
Journal/Conference/Book: Doctoraatssymposium Faculteit Toegepaste Wetenschappen
Editor/Publisher: Universiteit Gent, 
Location: Gent, Belgium
Citations: Look up on Google Scholar
Download: Download this Publication (485KB) (485KB)


We demonstrate compact integrated optical wavelength filters in Silicon-on-insulator nanophotonic waveguides. These filters can be used for wavelength division multiplexing in the infrared telecommunication wavelength range. The structures are fabricated in a CMOS line using deep UV lithography and dry etching techniques. We fabricated ring resonators with 8$\mu$m radius showing sharp resonances, an 8-channel arrayed waveguide grating with a footprint of about 0.1mm^2 but still high crosstalk between channels, and 5-stage cascaded Mach-Zehnder filters with high drop efficiency and -10dB crosstalk level.

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