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Authors: J. Schrauwen, F. Van Laere, D. Van Thourhout, R. Baets
Title: Focused-ion-beam fabrication of slanted grating couplers in silicon-on-insulator waveguides
Format: International Journal
Publication date: 3/2007
Journal/Conference/Book: Photonics Technology Letters
Volume(Issue): 19(11) p.816-818
DOI: 10.1109/lpt.2007.897293
Citations: 59 ( - last update: 14/7/2024)
27 (OpenCitations - last update: 3/5/2024)
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We have designed and fabricated an efficient grating
coupler for coupling light between optical fibers and silicon-on-insulator waveguides. The coupler consists of 88nm wide slits, etched at an angle of 58° to the surface normal. They are defined by direct etching with a focused ion beam, using iodine gas and an alumina hard mask. The measured efficiency is 46%.

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