Photonics Research Group Home
Ghent University Journals/Proceedings
About People Research Publications Education Services


Publication detail

Authors: W. Bogaerts, P. Bradt, L. Vanholme, P. Bienstman, R. Baets
Title: Closed-loop modeling of silicon nanophotonics from design to fabrication and back again
Format: International Journal
Publication date: 1/2009
Journal/Conference/Book: Optical and Quantum Electronics
Editor/Publisher: Springer Neherlands, 
Volume(Issue): 40(11) p.801-811
DOI: 10.1007/s11082-008-9265-y
Citations: 18 ( - last update: 14/7/2024)
11 (OpenCitations - last update: 3/5/2024)
Look up on Google Scholar
Download: Download this Publication (309KB) (309KB)


We present a method for component-centric modeling of silicon nanophotonics, where a closed optimization loop allows to take the effects of the fabrication process into account during the design of nanophotonic components. This enables black-box component descriptions with functional parameters. Underlying mask layouts of the components can then automatically be optimized for their actual performance, and not just for their geometric layout. To simulate the effect of fabrication, we developed a projection lithography simulator which was included inside the optimization loop. This method was applied to the design of a 1-dimensional distributed Bragg mirror.

Related Research Topics

Related Projects

Citations (OpenCitations)

Back to publication list