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Authors: P. Neutens, A. Subramanian, M. Ul Hassan, C. Chen, R. Jansen, T. Claes, X. Rottenberg, B. Du Bois, K. Leyssens, P. Helin, S. Severi, A. Dhakal, F. Peyskens, L. Lagae, P. Deshpande, R. Baets, P. Van Dorpe
Title: Characterization of PECVD silicon nitride photonic components at 532 and 900 nm wavelength
Format: International Conference Proceedings
Publication date: 4/2014
Journal/Conference/Book: 4th Conference on Silicon Photonics and Photonic Integrated Circuits
Volume(Issue): p.article 91331F ( 6 pages)
Location: Brussels, Belgium
DOI: 10.1117/12.2052119
Citations: 3 ( - last update: 14/7/2024)
2 (OpenCitations - last update: 27/6/2024)
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