Authors:	Y. Xing, M. Wang, A. Ruocco, J. Geessels, U. Khan, W. Bogaerts
Title:	A Compact Silicon Photonics Circuit to Extract Multiple Parameters for Process Control Monitoring
Format:	International Journal
Publication date:	2/2020
Journal/Conference/Book:	OSA Continuum
Editor/Publisher:	OSA,
Volume(Issue):	3(2) p.379-390
DOI:	10.1364/OSAC.383711
Citations:	17 (Dimensions.ai - last update: 21/12/2025) 12 (OpenCitations - last update: 27/6/2025) Look up on Google Scholar
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Abstract

We present a compact circuit to extract multiple parameters of on-chip waveguides and directional couplers from optical measurements. The compact design greatly improves the accuracy of extraction with lesser measurements, making it useful for process monitoring and detailed wafer-level variability analysis. We discuss the design requirements and illustrate the extraction using the Restart-CMA-ES global optimization algorithm.

Related Research Topics

• Variability Aware Design
• Compact Circuit Models and Extraction

Related Projects

• FWO: G013815N-ScaleModel (Scalable behavioral models for large-scale silicon photonics)
• VLAIO: MEPIC (Model extraction to enable first-time right photonics integrated circuit design)