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Authors: Y. Xing, M. Wang, A. Ruocco, J. Geessels, U. Khan, W. Bogaerts
Title: A Compact Silicon Photonics Circuit to Extract Multiple Parameters for Process Control Monitoring
Format: International Journal
Publication date: 2/2020
Journal/Conference/Book: OSA Continuum
Editor/Publisher: OSA, 
Volume(Issue): 3(2) p.379-390
DOI: 10.1364/OSAC.383711
Citations: 3 (Web of Knowledge / Dimensions.ai - last update: 16/9/2020)
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Abstract

We present a compact circuit to extract multiple parameters of on-chip waveguides and directional couplers from optical measurements. The compact design greatly improves the accuracy of extraction with lesser measurements, making it useful for process monitoring and detailed wafer-level variability analysis. We discuss the design requirements and illustrate the extraction using the Restart-CMA-ES global optimization algorithm.

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