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Authors: I. Ansari, J. George, G.F Feutmba, J. Beeckman , D. Van Thourhout
Title: Acousto-optic modulation in a Si-waveguide
Format: International Conference Proceedings
Publication date: 12/2021
Journal/Conference/Book: IEEE International Conference on Group IV Photonics
Volume(Issue): p.paper TuC2 (2 pages)
DOI: 10.1109/GFP51802.2021.9673971
Citations: Look up on Google Scholar
Download: Download this Publication (695KB) (695KB)

Abstract

We demonstrate acousto-optic modulation (VπL∼3.6 Vcm) in a Si waveguide circuit by integrating a photonic compatible PZT film on the SOI chip. We then fabricated a small footprint inter-digital transducer (IDT) on the film to piezoelectrically actuate acoustic waves at GHz frequencies.

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