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MEMS and NEMS optical actuators in SOI

Research Area: Large-scale Photonic Integration, Silicon Photonics Process Technology

Main Researcher: Wim Bogaerts

Silicon-on-insulator (SOI) is not only a good material for integrated optics, but also for MEMS and NEMS (micro and nano-electromechanical systems). By physically moving waveguides, the optical phase and coupling can be adjusted.

This can be used for actuators, such as phase shifters and tunable couplers, but also for opto-mechanical transducers in sensing.

This can use both out-of-plane or in-plane movement, with out without electrical actuation.

Other people involved:

Related Research Projects

PhD thesises


    International Journals

  1. H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Verheyen, W. Bogaerts, N. Quack, Compact broadband suspended silicon photonic directional coupler, Optics Letters, 45(11), p.2997-3000 doi:10.1364/OL.394470 (2020)  Download this Publication (1MB).
  2. N. Quack, H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Verheyen, W. Bogaerts, P. Edinger, C. Errando-Herranz, K.B Gylfason, MEMS-enabled Silicon Photonic Integrated Devices and Circuits, Journal of Quantum Electronics (invited), 56(1), p.8400210 doi:10.1109/JQE.2019.2946841 (2020)  Download this Publication (3.6MB).
  3. C. Errando-Herranz, N. Le Thomas, K. B. Gylfason, Low-power optical beam steering by microelectromechanical waveguide gratings, Optics Letters, 44(4), United States, doi:10.1364/OL.44.000855 (2019).
  4. S. Rudra, R. Van Hoof, J. De Coster, G. Bryce, S. Severi, A. Witvrouw, D. Van Thourhout, A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator, Microelectronics Engineering, 105, p.8-12 doi:10.1016/j.mee.2012.12.014 (2013)  Download this Publication (871KB).
  5. K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, R. Baets, Ultra-compact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in Silicon-On-Insulator, IEEE Photonics Journal, 4(3), p.779-788 doi:10.1109/jphot.2012.2198880 (2012)  Download this Publication (1.2MB).
  6. J. Roels, W. Van Der Tempel, D. Van Nieuwenhove, R. Grootjans, M. Kuijk, D. Van Thourhout, R. Baets, Continuous Time-of-Flight ranging using a MEMS diffractive subwavelength period grating (de)modulator, Photonics Technology Letters, 20(22), p.1827-1829 doi:10.1109/lpt.2008.2004348 (2008)  Download this Publication (254KB).
  7. I. Vlaminck, J. Roels, D. Taillaert, D. Van Thourhout, R. Baets, L. Lagae, G. Borghs, Detection of nanomechanical motion by evanescent light wave coupling, Applied Physics Letters, 90, doi:10.1063/1.2746067 (2007)  Download this Publication (353KB).
      International Conferences

    1. W. Bogaerts, P. Edinger, A.Y. Takabayashi, I. Zand, X. Chen, H. Sattari, P. Verheyen, M. Jezzini, G. Talli, S. Kumar, M. Garcia-Porcel, A. Ribeiro, G. Jo, N. Quack, K. Gylfason, F. Niklaus, U. Khan, Building Large-Scale Programmable Photonic Circuits Using Silicon Photonics MEMS, OSA Advanced Photonics Congress - Photonics in Switching and Computing (invited), Canada, p.PsTh1F.1 (2020)  Download this Publication (965KB).
    2. A.Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack, Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch, European Conference on Integrated Optics, p.10.1 (2020)  Download this Publication (492KB).
    3. P. Edinger, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, K. Gylfason, Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics, Conference on Lasers and Electro-Optics, United States, p.SM3J.2 (2020)  Download this Publication (486KB).
    4. W. Bogaerts, H. Sattari, P. Edinger, A. Takabayashi, I. Zand, X. Wang, A. Ribeiro, M. Jezzini, C. Errando-Herranz, G. Talli, C. Lerma Arce, S. Kumar, M. Garcia, P. Verheyen, B. Abasahl, F. Niklaus, N. Quack, K. Gylfason, P. O'Brien, U. Khan, MORPHIC: Programmable Photonic Circuits enabled by Silicon Photonic MEMS, SPIE Photonics West - OPTO (invited), 11285, United States, p.1128503 doi:10.1117/12.2540934 (2020)  Download this Publication (11.6MB).
    5. U. Khan, B. Abasahl, I. Zand, N. Quack, K. Gylfason, M. Jezzini, H. Y. Hwang, M. A. G. Porcel, C. Lerma Arce, S. Kumar, W. Bogaerts, Generic Platform for Silicon Photonics based on MEMS Reconfigurable Photonic Integrated Circuits, Photonics & Electromagnetics Research Symposium (PIERS) 2019 (invited), Italy, p.2271 (2019)  Download this Publication (557KB).
    6. N. Quack, H. Sattari, A.Y. Takabayashi, Y. Zhang, P. Edinger, C. Errando-Herranz, K. Gylfason, X. Wang, F. Niklaus, M. A. Jezzini, H.Y. Hwang, P. O'Brien, M.A.G. Porcel, C. Lerma Arce, S. Kumar, B. Abasahl, P. Verheyen, W. Bogaerts, Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits, Optical Fiber Communication Conference (invited), United States, p.M2D.3 doi:10.1364/ofc.2019.m2d.3 (2019)  Download this Publication (447KB).
    7. B. Abasahl, I. Zand, C. Lerma Arce, S. Kumar, N. Quack, M. A. Jezzini, H. Y. Hwang, K. Gylfason, M. A. G. Porcel, W. Bogaerts, Towards Low-Power Reconfigurable Photonic ICs Based on MEMS Technology, Australian Institute of Physics Congress (invited), Australia, (2018).
    8. U. Khan, W. Bogaerts, N. Quack, K.B. Gylfason , P. Verheyen, P. O'Brien, C.L. Arce, M. Garcia, The MORPHIC Project: Enabling large scale programmable photonic circuits using MEMS, Photonics Ireland Conference 2018 (invited), Ireland, p.We.J1.3 (2018)  Download this Publication (859KB).
    9. R. Wang, D. Sanchez, G. Roelkens, Design of a MEMS tunable mid-infrared VCSEL integrated on the SOI platform , Proceedings of the 2013 Annual Symposium of the IEEE Photonics Society Belenux Chapter, Netherlands, p.159-162 (2013)  Download this Publication (462KB).
    10. K. Van Acoleyen, J. Roels, T. Claes, D. Van Thourhout, R. Baets, NEMS-based optical phase modulator fabricated on Silicon-On-Insulator, 8th International Conference on Group IV Photonics, FC6, United Kingdom, p.371-373 doi:10.1109/group4.2011.6053820 (2011)  Download this Publication (994KB).
    11. S. Rudra, J. De Coster, R. Van Hoof, A. Witvrouw, D. Van Thourhout, Static and dynamic characterization of poly-SiGe Grating Light Valves, IEEE Optical MEMS and Nanophotonics 2011, Turkey, p.203-204 doi:10.1109/omems.2011.6031031 (2011)  Download this Publication (281KB).
    12. J. Roels, I. De Vlaminck, L. Lagae, B. Maes, D. Van Thourhout, R. Baets, Optomechanical interactions between nanophotonic wires on a silicon-on-insulator-chip, Optical MEMS & Nanophotonics 2009, United States, p.33-34 doi:10.1109/omems.2009.5338609 (2009)  Download this Publication (308KB).
    13. J. Roels, W. Van der Tempel, D. Van Nieuwenhove, R. Grootjans, M. Kuijk, D. Van Thourhout, R. Baets, A dynamic subwavelength pitch grating modulator for continuous Time-Of-Flight ranging with optical mixing, Optical MEMS&Nanophotonics 2008, Germany, p.176-177 doi:10.1109/omems.2008.4607886 (2008)  Download this Publication (302KB).
    14. J. Roels, W. Van Der Tempel, D. Van Nieuwenhove, R. Grootjans, M. Kuijk, D. Van Thourhout, R. Baets, Measuring the time-of-flight with an optical MEMS-modulator, ePIXnetSpring School , Italy, p.40 - poster nr. 8 (2008)  Download this Publication (654KB).
    15. W. van der Tempel, D. Van Nieuwenhove, R. Grootjans, L. Jovanov, J. Roels, A. Pizurica, D. Van Thourhout, R. Baets, W. Philips, M. Kuijk, State-of-the-art modulator approaches for Continuous Time-of-Flight range finding, IEEE/LEOS Symposium Benelux Chapter Proceedings,2007, Belgium, p.63-66 (2007)  Download this Publication (2.7MB).
    16. I. De Vlaminck, J. Roels, D. Taillaert, D. Van Thourhout, L. Lagae, R. Baets, G. Borghs, Integrated nanomechanical motion detection by evanescent light-wave coupling, SPIE Photonics West (MOEMS/MEMS), United States, (2007)  Download this Publication (3.3MB).
    17. J. Roels, I. De Vlaminck, D. Van Thourhout, L. Lagae, D. Taillaert, R. Baets, A nanophotonic NEMS-modulator in Silicon-on-Insulator, 2006 Annual Symposium of the IEEE/LEOS Benelux Chapter, Netherlands, (2006)  Download this Publication (826KB).
    18. J. Roels, D. Van Thourhout, R. Baets, Nanophotonic NEMS modulators in Silicon-on-insulator, ePIXnet Winter School, Optoelectronic Integration - Technology and Applications, Switzerland, p.75 (2006)  Download this Publication (541KB).
        National Conferences

      1. J. Roels, I. De Vlaminck, D. Van Thourhout, L. Lagae, D. Taillaert, R. Baets, A nanophotonic NEMS-modulator in silicon-on-insulator, 7e UGent-FirW Doctoraatssymposium, interactive poster session, Belgium, p.paper nr. 19 (2006)  Download this Publication (534KB).

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