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Authors: P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, R. Baets
Title: Low-loss SOI Photonic Wires and Ring Resonators Fabricated with Deep UV Lithography
Format: International Journal
Publication date: 5/2004
Journal/Conference/Book: IEEE Photonics Technology Letters
Volume(Issue): 16(5) p.1328-1330
Internal Reference: [N-305]
Download: Download this Publication (160KB) (160KB)

Abstract

We demonstrate single-mode photonic wires in Silicon-on-insulator with propagation loss as low as 2.4dB/cm, fabricated with deep UV lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk

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