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Publication detail
Authors:
J. Schrauwen
,
D. Van Thourhout
,
R. Baets
Title:
Trimming of silicon ring resonator by electron beam induced compaction
Format:
International Conference Presentation
Publication date:
6/2008
Journal/Conference/Book:
ECIO 2008
Citations:
Look up on Google Scholar
Download:
(142KB)
Related Research Topics
Silicon (nano)photonic devices fabrication with 193nm and 248nm (DUV) Optical lithography (1999-2012)
Focused-ion-beam fabrication (2005-2011)
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