| Authors: | Y. Liu, U. Khan, W. Bogaerts | | Title: | Accurately extracting silicon waveguide dimensions from a single high-order Mach-Zehnder Interferometer | | Format: | International Journal | | Publication date: | 3/2025 | | Journal/Conference/Book: | Optics Express
| | Volume(Issue): | 33(6) p.13530-13546 | | Location: | Belgium | | DOI: | 10.1364/OE.558406 | | Citations: | Look up on Google Scholar
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Abstract
We experimentally demonstrate a new methodology for the extraction of dimensions from silicon-on-insulator (SOI) strip waveguides manufactured in IMEC’s iSiPP50G silicon photonics platform. The effective index and group index of the waveguide are determined from the spectral data of a single high-order Mach-Zehnder Interferometer (MZI). In this study, we introduce an innovative mapping model that effectively relates the geometric dimensions of the SOI waveguide to its effective index and group index, thereby enhancing mapping accuracy and reducing model complexity. Furthermore, we will elucidate the feasibility and constraints for extracting effective index and group index through the optical transmission measurement of only a single high-order MZI. Our analysis also addresses the parameter extraction errors that have a significant impact on the results, which have not been previously discussed in the literature. Related Research Topics
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