| Authors: | U. Khan, I. Zand, P. Edinger, G. Jo, S. Bleiker, A. Y. Takabayashi, C. Antony, J. Lee, A. Kumar, P. Verheyen, C. Lerma Arce, T. Jonuzi, J. Watte, N. Quack, F. Niklaus, K. Gylfason, W. Bogaerts | | Title: | Large scale programmable photonic circuits using silicon photonic MEMS | | Format: | International Conference Proceedings | | Publication date: | 5/2022 | | Journal/Conference/Book: | Conference on Lasers and Electro-Optics
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| | Volume(Issue): | p.AM2C.5 | | Location: | San Jose, California, United States | | DOI: | 10.1364/CLEO_AT.2022.AM2C.5 | | Citations: | 2 (Dimensions.ai - last update: 6/7/2025)
1 (OpenCitations - last update: 28/10/2025)
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Abstract
We demonstrate low-power and non-volatile MEMS actuators on an industrially established silicon photonics platform. The compact electrostatically actuated phase shifters and tunable couplers enable large-scale programmable photonic integrated circuits Related Research Topics
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