Authors: | G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets |
Title: | Efficient fiber to SOI photonic wire coupler fabricated using standard CMOS technology |
Format: | International Conference Proceedings |
Publication date: | 10/2005 |
Journal/Conference/Book: | Proceedings of the 18th Annual Meeting of the IEEE Lasers & Electro-Optics Society (LEOS 2005)
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Volume(Issue): | p.TuD2 |
Location: | Sydney, Australia |
DOI: | 10.1109/leos.2005.1547946 |
Citations: | 4 (Dimensions.ai - last update: 17/11/2024) 3 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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We present a Silicon-on-Insulator spot size converter fabricated using 248nm deep UV lithography. The loss of the taper structure is around 1dB over more than 60nm wavelength range while the overall coupling loss from a lensed fiber into a 590nm wide SOI waveguide was measured to be 1.9dB.