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ISTPICMOS

IST: PICMOS

Full Name: Photonic Interconnect Layer on CMOS by wafer-scale integration

Duration: 1/1/2004-31/3/2007 (Finished)

Partners:

  • IMEC - INTEC(BE)
  • ST Microelectronics (FR)
  • CEA (FR)
  • TRACIT Technologies (FR)
  • CNRS-FMNT (FR)
  • NCSR-Demokritos (GR)
  • TU/E (NL)

Objective:

  • Demonstrate the feasibility of adding a photonic interconnect layer on top of silicon ICs containing CMOS-circuitry, with the photonic layer created by a combination of wafer bonding and wafer-scale processing steps

INTEC's Role:

  • Project coordination, development of SOI wiring circuits, development of III-V sources bonded on SOI circuits

Project Web site: http://picmos.intec.ugent.be

People involved

Research topics involved

Publications in the framework of this project (54)

    International Journals

  1. L. Liu, J. Van Campenhout, G. Roelkens, R.A. Soref, D. Van Thourhout, P.R ojo-Romeo, P. Regreny, C. Seassal, J.-M. Fedeli, R. Baets, Carrier-injection-based electro-optic modulator on silicon-on-insulator with a heterogeneously integrated III-V microdisk cavity, Optics Letters, 33(21), p.2518 doi:10.1364/ol.33.002518 (2008)  Download this Publication (323KB).
  2. L. Liu, J. Van Campenhout, G. Roelkens, D. Van Thourhout, P. Rojo Romeo, P. Regreny, C. Seassal, J.-M. Fedeli, R. Baets, Ultralow-power all-optical wavelength conversion in a silicon-on-insulator waveguide based on a heterogeneously integrated III-V microdisk laser, Applied Physics Letters, 93(6), p.061107 doi:10.1063/1.2967338 (2008)  Download this Publication (146KB).
  3. J. Van Campenhout, L. Liu, P. Rojo Romeo, D. Van Thourhout, C. Seassal, P. Regreny, L. Di Cioccio, J.-M. Fedeli, R. Baets, A Compact SOI-Integrated Multiwavelength Laser Source Based on Cascaded InP Microdisks, IEEE PHOTONICS TECHNOLOGY LETTERS, 20(16), p.1345-1347 doi:10.1109/lpt.2008.926857 (2008)  Download this Publication (226KB).
  4. I. O'Connor, F. Tissafi-Drissi, F. Gaffiot, J. Dambre, M. Dewilde, J. Van Campenhout, D. Van Thourhout, J. Van Campenhout, D. Stroobandt, Systematic Simulation-Based Predictive Synthesis of Integrated Optical Interconnect, IEEE Transactions on Very Large Scale Integration Systems, 15(8), p.927 doi:10.1109/tvlsi.2007.900730 (2007).
  5. J. Van Campenhout, P. Rojo Romeo, D. Van Thourhout, C. Seassal, P. Regreny, L. Di Cioccio, J.-M. Fedeli, R. Baets, Thermal Characterization of Electrically Injected Thin-Film InGaAsP Microdisk Lasers on Si, Journal of Lightwave Technology, 25(6), p.1543-1548 doi:10.1109/jlt.2007.895552 (2007)  Download this Publication (542KB).
  6. J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Baets, Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit, Optics Express, 15(11), p.6744-6749 doi:10.1364/oe.15.006744 (2007)  Download this Publication (2.5MB).
  7. W. Bogaerts, P. Dumon, D. Van Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, R. Baets, Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires, J. Selected Topics in Quantum Electronics, 12(6), p.1394-1401 doi:10.1109/jstqe.2006.884088 (2006)  Download this Publication (799KB).
  8. G. Roelkens, D. Van Thourhout, R. Baets, High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay, Optics Express, 14(24), p.11622-11630 doi:10.1364/oe.14.011622 (2006)  Download this Publication (803KB).
  9. G. Roelkens, J. Brouckaert, D. Van Thourhout, R. Baets, R. Notzel, M. Smit, Adhesive Bonding of InP/InGaAsP Dies to Processed Silicon-on-Insulator Wafers using DVS-bis-Benzocyclobutene, Journal of Electrochemical Society, 153(12), p.G1015-G1019 doi:10.1149/1.2352045 (2006)  Download this Publication (691KB).
  10. G. Roelkens, D. Van Thourhout, R. Baets, R. Notzel, M. Smit, Laser emission and photodetection in an InP/InGaAsP layer integrated on and coupled to a Silicon-on-Insulator waveguide circuit, Optics Express, 14(18), p.8154-8159 doi:10.1364/oe.14.008154 (2006)  Download this Publication (857KB).
  11. P. Dumon, G.R.A. Priem, L.R. Nunes, W. Bogaerts, D. Van Thourhout, P. Bienstman, T.K. Liang, M. Tsuchiya, P. Jaenen, S. Beckx, J. Wouters, R. Baets, Linear and nonlinear nanophotonic devices based on silicon-on-insulator wire waveguides, Japanese Journal of Applied Physics, 45(8B), p.6589-6602 doi:10.1143/jjap.45.6589 (2006)  Download this Publication (649KB).
  12. Rojo Romeo, P., J. Van Campenhout, Regreny, P., Kazmierczak, A., Seassal, C., Letartre, X., Hollinger, G., D. Van Thourhout, R. Baets, Fedeli, J.M., Di Cioccio, L., Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs, Optics Express, 14(9), p.3864-3871 doi:10.1364/oe.14.003864 (2006)  Download this Publication (309KB).
  13. P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, R. Baets, J. Wouters, S. Beckx, P. Jaenen, Compact wavelength router based on a Silicon-on-insulator arrayed waveguide grating pigtailed to a fiber array, Optics Express, 14(2), p.664-669 doi:10.1364/opex.14.000664 (2006)  Download this Publication (707KB).
  14. G. Roelkens, J. Brouckaert, D. Taillaert, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Integration of InP/InGaAsP photodetectors onto Silicon-on-Insulator waveguide circuits, Optics Express, 13(25), p.10102-10108 doi:10.1364/opex.13.010102 (2005)  Download this Publication (551KB).
  15. J. Van Campenhout, P. Bienstman, R. Baets, Band-Edge Lasing in Gold-Clad Photonic-Crystal Membranes, IEEE Journal on Selected Areas in Communications, 23(7), p.1418-1423 doi:10.1109/jsac.2005.851160 (2005)  Download this Publication (490KB).
  16. I. Christiaens, G. Roelkens, K. De Mesel, D. Van Thourhout, R. Baets, Thin film devices fabricated with BCB waferbonding, Journal of Lightwave Technology, 23(2), p.517 doi: 10.1109/JLT.2004.841783 (2005)  Download this Publication (1.1MB).
  17. W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, D. Van Thourhout, Nanophotonic Waveguides in Silicon-on-Insulator Fabricated with CMOS Technology, Journal of Lightwave Technology (invited), 23(1), p.401-412 doi:10.1109/JLT.2004.834471 (2005)  Download this Publication (2.5MB).
      International Conferences

    1. L. Liu, J. Van Campenhout, G. Roelkens, D. Van Thourhout, R. Baets, IIIV/SOI Heterogeneous Integration of Optoelectronic Devices, Asia Optical Fiber Communication and Optoelectronic Exhibition and Conference 2008 (invited), China, p.SaN6 doi:10.1364/aoe.2008.san6 (2008)  Download this Publication (323KB).
    2. L. Liu, J. Van Campenhout, G. Roelkens, D. Van Thourhout, P. Rojo Romeo, P. Regreny, C. Seassal, J.-M. Fedeli, R. Baets, All-Optical Wavelength Converter with InP Micro-disk Laser Integrated on SOI, ECOC 2008, Belgium, p.Tu..C.3 doi:10.1109/ecoc.2008.4729245 (2008)  Download this Publication (347KB).
    3. G. Roelkens, L. Liu, J. Van Campenhout, J. Brouckaert, D. Van Thourhout, R. Baets, Heterogeneous III-V/SOI photonic integrated circuits, Photonics in Switching (invited), Japan, (2008)  Download this Publication (1.1MB).
    4. L. Liu, J. Van Campenhout, P. Rojo-Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Baets, Compact Multiwavelength Laser Source Based on Cascaded InP-Microdisks Coupled to One SOI Waveguide, The Optical Fiber Communication Conference 2008, United States, p.OWQ3 doi:10.1109/ofc.2008.4528760 (2008)  Download this Publication (358KB).
    5. D. Van Thourhout, J. Van Campenhout, R. Baets, P. Rojo-Romeo, P. Regreny, C. Seassal, C. Lagahe, X. Leijtens, P. Binetti, R. Notzel, M. Smit, L Di Cioccio, J.-M. Fedeli, Invited: A Photonic Interconnect Layer on CMOS, ECOC 2007 - European Conference on Optical Communications (invited), Germany, p.6.3.1 (2007)  Download this Publication (130KB).
    6. J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, L. Di Cioccio, J. M. Fedeli, R. Baets, Electrically Pumped InP-based Microdisk Lasers Integrated with a Nanophotonic SOI Waveguide Circuit, OFC 2007, United States, p.PDP 35 (2007)  Download this Publication (3.8MB).
    7. R. Baets, W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, SOI Photonic Wire Based Components with Compact and Efficient Fiber Couplers , Optical Fiber Communications (invited), United States, p.OWG3 doi:10.1109/ofc.2007.4348871 (2007)  Download this Publication (594KB).
    8. W. Bogaerts, P. Dumon, D. Van Thourhout, R. Baets, Compact, Low-Loss Waveguide Crossings for High-Index-Contrast SOI Photonic Wires , Optical Fiber Communications, United States, p.OTuM1 doi:10.1109/ofc.2007.4348825 (2007)  Download this Publication (359KB).
    9. J. Van Campenhout, P. Rojo-Romeo, D. Van Thourhout, C. Seassal, P. Regreny, L. Di Cioccio, J. M. Fedeli, R. Baets, Electrically Injected InGaAsP Microdisk Lasers Heterogeneously Integrated on a Si-wafer, International Semiconductor Laser Conference, United States, p.133-134 doi:10.1109/islc.2006.1708122 (2006)  Download this Publication (289KB).
    10. G. Roelkens, J. Brouckaert, D. Van Thourhout, R. Baets, Adhesive bonding of III-V dies to processed SOI using BCB for photonic applications, 210th Electrochemical Society meeting, Mexico, doi:10.1149/1.2357082 (2006)  Download this Publication (451KB).
    11. G. Roelkens, J. Brouckaert, D. Van Thourhout, R. Baets, Thin film III-V devices integrated on Silicon-on-Insulator waveguide circuits, 210th Electrochemical Society meeting, Mexico, doi:10.1149/1.2392923 (2006)  Download this Publication (576KB).
    12. G. Roelkens, J. Brouckaert, S. Verstuyft, J. Schrauwen, D. Van Thourhout, R. Baets, Heterogeneous integration of III-V photodetectors and laser diodes on Silicon-on-Insulator waveguide circuits, Group IV photonics 2006, Canada, p.ThB2 doi:10.1109/group4.2006.1708208 (2006)  Download this Publication (1.5MB).
    13. H. Desmet, K. Neyts, D. Van Thourhout, R. Baets, Focused ion beam technology for aligning and switching liquid crystals, 21st International Liquid Crystal Conference, United States, p.704 (2006)  Download this Publication (57KB).
    14. P. Bienstman, F. Van Laere, D. Taillaert, P. Dumon, W. Bogaerts, K. De Vos, D. Van Thourhout, R. Baets, High index-contrast silicon-on-insulator nanophotonics, ICTON (invited), United Kingdom, p.Tu.D2.1 doi:10.1109/icton.2006.248354 (2006)  Download this Publication (1.4MB).
    15. P. Rojo-Romeo, J. Van Campenhout, P. Regreny, F. Mandorlo, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J.M. Fedeli, L. Di Cioccio, InP on silicon electrically driven microdisk lasers for photonic ICs, International Conference on Indium Phosphide and Related Materials, doi:10.1109/iciprm.2006.1634111 (2006)  Download this Publication (441KB).
    16. D. Van Thourhout, W. Bogaerts, P. Dumon, G. Roelkens, J. Van Campenhout, R. Baets, Functional Silicon Wire Waveguides, Integrated Photonics Research and Application, Nanophotonics, OSA Topical Meetings, United States, p.IWA6.pfd doi:10.1364/ipra.2006.iwa6 (2006)  Download this Publication (416KB).
    17. F. Van Laere, G. Roelkens, J. Schrauwen, D. Taillaert, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Compact grating couplers between optical fibers and Silicon-on-Insulator photonic wire waveguides with 69% coupling efficiency, OFC 2006, United States, p.PDP15 doi:10.1109/ofc.2006.216051 (2006)  Download this Publication (639KB).
    18. G. Roelkens, J. Brouckaert, D. Taillaert, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Heterogeneous integration of InP/InGaAsP photodetectors onto ultracompact Silicon-on-Insulator waveguide circuits, SPIE PhotonicsWest, 6125, p.131-138 doi:10.1117/12.645587 (2006)  Download this Publication (3.1MB).
    19. W. Bogaerts, P. Dumon, J. Wouters, P. Jaenen, S. Beckx, V. Wiaux, D. Van Thourhout, D. Taillaert, B. Luyssaert, R. Baets, Silicon-on-Insulator Nanophotonics, SPIE Optics and Optoelectronics (invited), 5956, Poland, p.5956R-1-15 (2005)  Download this Publication (758KB).
    20. D. Van Thourhout, G. Roelkens, J. Van Campenhout, J. Brouckaert, R. Baets, Technologies for on-chip optical interconnects, Proceedings of the 18th Annual Meeting of the IEEE Lasers & Electro-Optics Society (LEOS 2005), Australia, p.TuE2 (2 pages) doi:10.1109/leos.2005.1547950 (2005)  Download this Publication (977KB).
    21. R. Baets, D. Van Thourhout, G. Morthier, W. Bogaerts, L. Vanholme, Silicon-on-insulator based high index contrast waveguide devices: research in europe, 11th Microoptics Conference (MOC) (invited), Japan, p.E2, Session C ( 4 pages) (2005)  Download this Publication (303KB).
    22. G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, Efficient fiber to SOI photonic wire coupler fabricated using standard CMOS technology, Proceedings of the 18th Annual Meeting of the IEEE Lasers & Electro-Optics Society (LEOS 2005), Australia, p.TuD2 doi:10.1109/leos.2005.1547946 (2005)  Download this Publication (864KB).
    23. J. Van Campenhout, P. Rojo-Romeo, D. Van Thourhout, C. Seassal, P. Regreny, L. Di Cioccio, J.M. Fedeli, R. Baets, An electrically driven membrane microdisk laser for the integration of photonic and electronic ICs, The 18th Annual Meeting of the IEEE Lasers & Electro-Optics Society (LEOS 2005), Australia, p.PD 1.7 (2005)  Download this Publication (487KB).
    24. D. Van Thourhout, P. Dumon, W. Bogaerts, G. Roelkens, G.R.A. Priem, R. Baets, Recent Progress in SOI Nanophotonic Waveguides, European Conference on Optical Communication (ECOC) 2005 (invited), United Kingdom, p.Tu3.6.2 doi:10.1049/cp:20050462 (2005)  Download this Publication (567KB).
    25. R. Baets, P. Dumon, W. Bogaerts, G. Roelkens, D. Taillaert, B. Luyssaert, G.R.A. Priem, G. Morthier, P. Bienstman, D. Van Thourhout, Silicon-on-insulator based Nano-photonics: Why, How, What for?, Group IV Photonics (invited), Belgium, p.168-170 (2005)  Download this Publication (172KB).
    26. P. Dumon, G. Roelkens, W. Bogaerts, D. Van Thourhout, J. Wouters, S. Beckx, P. Jaenen, R. Baets, Basic Photonic Wire Components in Silicon-on-Insulator, Group IV Photonics, Belgium, p.189-191 doi:10.1109/group4.2005.1516448 (2005)  Download this Publication (707KB).
    27. J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, Membrane-type DBR-microlasers for the integration of electronic and photonic ICs, Workshop on Photonic and Electromagnetic Crystal Structures (PECS-VI), Greece, p.D.32 (2005)  Download this Publication (807KB).
    28. D. Taillaert, R. Baets, P. Dumon, W. Bogaerts, D. Van Thourhout, B. Luyssaert, V. Wiaux, S. Beckx, J. Wouters, Silicon-on-Insulator Platform for Integrated Wavelength-Selective Components, Workshop on Fibres and Optical Passive Components (invited), Italy, doi:10.1109/wfopc.2005.1462110 (2005)  Download this Publication (1MB).
    29. D. Néel, T. Benyattou, R. Orobtchouk, P. Dumon, D. Van Thourhout, SNOM for the optical characterisation of photonic crystal structures, Workshop on Photonic and Electromagnetic Crystal Structures (PECS-VI), Greece, p.C.32 (2005)  Download this Publication (486KB).
    30. P. Dumon, I. Christiaens, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, D. Van Thourhout, R. Baets, Microring resonators in Silicon-on-insulator, ECIO 2005 , France, p.196-199 (2005)  Download this Publication (606KB).
    31. J. Van Campenhout, P. Bienstman, R. Baets, Membrane-type photonic-crystal microlasers for the integration of electronic and photonic ICs, IEEE/LEOS BENELUX Chapter - 2004 Annual Symposium, Belgium, p.279-282 (2004)  Download this Publication (907KB).
    32. P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, R. Baets, Wavelength-selective components in SOI photonic wires fabricated with deep UV lithography, Group IV Photonics, Hong Kong, p.WB5 doi:10.1109/group4.2004.1416642 (2004)  Download this Publication (199KB).
    33. P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, V. Wiaux, S. Beckx, J. Wouters, R. Baets, Cascaded Mach-Zehnder Filters in Silicon-on-Insulator Photonic Wires fabricated with deep UV lithography, European Conference on Optical Communication (ECOC) 2004, Th.(Post-deadline), Sweden, p.24-25 (2004)  Download this Publication (108KB).
    34. R. Baets, Photonic Crystal Research in IST, European Conference on Optical Communication (ECOC) 2004 (invited), 5(Symposia), Sweden, p.80-82 (2004)  Download this Publication (75KB).
    35. B. Luyssaert, P. Vandersteegen, W. Bogaerts, P. Dumon, P. Sanchis, J. Marti, R. Baets, A Versatile Optical Spot-Size Converter Design, European Conference on Optical Communication (ECOC) 2004, We(3), Sweden, p.468-469 (2004)  Download this Publication (279KB).
        National Conferences

      1. J. Van Campenhout, D. Van Thourhout, P. Bienstman, C. Seassal, P. Rojo-Romeo, L. Di Cioccio, J.-M. Fedeli, Membrane microlasers for the integration of photonic and electronic Ics, 6th UGent-FirW Doctoraatssymposium, Belgium, p.39 (paper nr. 29) (2005)  Download this Publication (945KB).
      2. P. Dumon, W. Bogaerts, D. Van Thourhout, V. Wiaux, J. Wouters, S. Beckx, R. Baets, WDM filters in Silicon-on-insulator photonic wires, Doctoraatssymposium Faculteit Toegepaste Wetenschappen, Belgium, (2004)  Download this Publication (485KB).