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Integrated thin-film microcavity lasers

Research Area: Integrated lasers and LEDs , III-V Semiconductor Photonic ICs

Main Researcher: Liu Liu

For future generation electronic circuits, a severe bottleneck is expected on the global interconnect level. With decreasing device dimensions, it is increasingly difficult to keep propagation delays and power consumption acceptable. Therefore there is a need for radically different interconnect approaches and one of the most promising solutions is the use of an optical interconnect layer. A possible approach for a compact optical link is the use of a Silicon-on-Insulator (SOI) passive waveguide layer in combination with III-V semiconductor microlasers and microdetectors, which are defined in a III-V membrane bonded on top of the SOI-stack.

A good candidate for the microlaser is the thin-film microdisk laser: optically pumped lasing in this type of devices was already reported, however, electrical injection remained a major difficulty. We focus on the design, fabrication and measurement of electrically injected membrane microdisk lasers.

Thin-film microlasers for intra-chip optical interconnects
Thin-film microlasers for intra-chip optical interconnects

Fabrication can be done on wafer scale, with tools used for fabricating microelectronic cicuits.

Fabricated thin-film miocrodisk laser, integrated on SOI waveguide platform
Fabricated thin-film miocrodisk laser, integrated on SOI waveguide platform

Recently we have demonstrated electrically-injected lasing operation of a 1-µm-thick, 7.5-µm-diameter microdisk, evanescently coupled to an underlying SOI-wire waveguide. The device operated in continuous wave with a threshold current of 0.5mA and a slope efficiency of 30µW/mA measured at one end of the SOI waveguide, with a maximum output power of 10µW due to thermal roll-over. In pulsed regime, output peak powers up to 100µW have been recorded.

Measurement results for a 7.5-µm-diameter microdisk
Measurement results for a 7.5-µm-diameter microdisk

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Publications

    International Journals

  1. P. Mechet, S. Verstuyft, T. De Vries, T. Spuesens, P. Regreny, D. Van Thourhout, G. Roelkens, G. Morthier, Unidirectional III-V microdisk lasers heterogeneously integrated on SOI, Optics Express, 21(16), p.19339-19352 (2013)  Download this Publication (2.2MB).
  2. Y. De Koninck, F. Raineri, A. Bazin, R. Raj, G. Roelkens, R. Baets, Experimental demonstration of a hybrid III-V-on-silicon micro-laser based on resonant grating cavity mirrors, Optics Letters, 38(14), p.2496-2498 (2013)  Download this Publication (1018KB).
  3. T. Spuesens, J. Bauwelinck, P. Regreny, D. Van Thourhout, Realization of a compact optical interconnect on Silicon by heterogeneous integration of III-V, Photonics Technology Letters, 25(14), p.1332-1335 (2013)  Download this Publication (718KB).
  4. Y. De Koninck, G. Roelkens, R. Baets, Design of a hybrid III-V-on-silicon microlaser with resonant cavity mirrors, IEEE Photonics Journal, 5(2), p.2700413 (2013)  Download this Publication (901KB).
  5. P. Mechet, F. Raineri, A. Bazin, Y. Halioua, T. Spuesens, T. J. Karle, P. Regreny, P. Monnier, D. Van Thourhout, I. Sagnes, R. Raj, G. Roelkens, G. Morthier, Uniformity of the lasing wavelength of heterogeneously integrated InP microdisk lasers on SOI, Optics Express, 21(9), p.10622-10631 (2013)  Download this Publication (1.7MB).
  6. T. Spuesens, F. Mandorlo, P. Rojo-Romeo, P. Regreny, N. Olivier, J.M. Fedeli, D. Van Thourhout, Compact integration of optical sources and detectors on SOI for optical interconnects fabricated in a 200 mm CMOS pilot line, Journal of Lightwave Technology, 30(11), p.1764-1770 (2012)  Download this Publication (1.3MB).
  7. J. Hofrichter, T. Morf, A. La Porta, B.J. Offrein, P. Mechet, G. Morthier, T. De Vries, H.J.S. Dorren, O. Raz, Inverting and Non-Inverting Operation of InP Microdisk Modulators, Electronics Letters, (2012)  Download this Publication (265KB).
  8. J. Hofrichter, O. Raz, A. La Porta, T. Morf, P. Mechet, G. Morthier, T. De Vries, H.J. S. Dorren, B.J. Offrein, A low–power high–speed InP microdisk modulator heterogeneously integrated on a SOI waveguide, Optics Express, 20(9), p.9363-9370 (2012)  Download this Publication (2.4MB).
  9. G. Roelkens, L. Liu, D. Liang, R. Jones, A. Fang, B. Koch, J. Bowers, III-V/silicon photonics for on-chip and inter-chip optical interconnects, Laser & Photonics reviews (invited), p.DOI: 10.1002/lpor.200900033 (2010)  Download this Publication (7MB).
  10. L. Liu, G. Roelkens, J. Van Campenhout, J. Brouckaert, D. Van Thourhout, R. Baets, III-V/silicon-on-insulator nanophotonic cavities for optical network-on-chip, Journal of Nanoscience and Nanotechnology (invited), 10, p.1461-1472 (2010)  Download this Publication (1.8MB).
  11. Y. Halioua, T. Karle, F. Raineri, P. Monnier, I. Sagnes, R. Raj, G. Roelkens, D. Van Thourhout, Hybrid InP-based photonic crystal lasers on silicon on insulator wires, Applied Physics Letters, 95(20), p.201119 (2009)  Download this Publication (321KB).
  12. J. Van Campenhout, L. Liu, Pedro Rojo Romeo, D. Van Thourhout, Christian Seassal, Philippe Regreny, Lea Di Cioccio, Jean-Marc Fedeli, R. Baets, A Compact SOI-Integrated Multiwavelength Laser Source Based on Cascaded InP Microdisks, IEEE PHOTONICS TECHNOLOGY LETTERS, 20(16), p.1345-1347 (2008)  Download this Publication (226KB).
  13. J. Van Campenhout, P. Rojo Romeo, D. Van Thourhout, C. Seassal, P. Regreny, L. Di Cioccio, J.-M. Fedeli, R. Baets, Thermal Characterization of Electrically Injected Thin-Film InGaAsP Microdisk Lasers on Si, Journal of Lightwave Technology, 25(6), p.1543-1548 (2007)  Download this Publication (542KB).
  14. J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Baets, Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit, Optics Express, 15(11), p.6744-6749 (2007)  Download this Publication (2.5MB).
  15. Rojo Romeo, P., J. Van Campenhout, Regreny, P., Kazmierczak, A., Seassal, C., Letartre, X., Hollinger, G., D. Van Thourhout, R. Baets, Fedeli, J.M., Di Cioccio, L., Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs, Optics Express, 14(9), p.3864-3871 (2006)  Download this Publication (309KB).
  16. J. Van Campenhout, P. Bienstman, R. Baets, Band-Edge Lasing in Gold-Clad Photonic-Crystal Membranes, IEEE Journal on Selected Areas in Communications, 23(7), p.1418-1423 (2005)  Download this Publication (490KB).
      International Conferences

    1. P. Mechet, F. Raineri, A. Bazin, T. Spuesens, P. Regreny, P. Monnier, D. Van Thourhout, I. Sagnes, R. Raj, G. Roelkens, G. Morthier, Extremely uniform lasing wavelengths of InP microdisk lasers heterogeneously integrated on SOI, IEEE Photonics Conference 2013 (IPC), United States, p.ME3.2 (2013)  Download this Publication (320KB).
    2. P. Mechet, T. Spuesens, N. Olivier, J.-M. Fedeli, P. Regreny, D. Van Thourhout, G. Roelkens, G. Morthier, All-optical, low-power 2R regeneration of 10Gb/s NRZ signals using a III-V on SOI microdisk laser, 18th OptoElectronics and Communications Conference held jointly with 2013 International Conference on Photonics in Switching (OECC/PS), Japan, p.paper TuPO-4 (2013)  Download this Publication (811KB).
    3. G. Morthier, P. Mechet, T. Spuesens, G. Roelkens, D. Van Thourhout, Heterogeneously integrated InP microdisk lasers, the 7th International Conference on Nanophotonics (ICNP) The 3rd Conference on Advances in Optoelectronics and Micro/Nano Optics (AOM)2013 (invited), China, p.111 (2013)  Download this Publication (307KB).
    4. T. Spuesens, Y. De Koninck, D. Van Thourhout, Efficient vertical coupling between a silicon waveguide and an InP-based microdisk, 16th European Conference on Integrated Optics (ECIO 2012), Spain, p.paper 212 (2012)  Download this Publication (537KB).
    5. J. Hofrichter, F. Horst, B.J. Offrein, O. Raz, T. De Vries, H.J.S. Dorren, P. Mechet, G. Morthier, Microdisc Lasers Coupled to Silicon Waveguides as Versatile On-Chip Optical Components for Light Generation, Conversion and Detection, 2011 Semiconductor Conference Dresden (SCD 2011) , Germany, (2011).
    6. T. Spuesens, D. Van Thourhout, P. Rojo Romeo, P. Regreny, J.M. Fedeli, CW operation of III-V microdisk lasers on SOI fabricated in a 200 mm CMOS pilot line, Group IV Photonics 2011, p.199-201 (2011)  Download this Publication (458KB).
    7. P. Mechet, L. Liu, R. Kumar, K. Huybrechts, T. Spuesens, G. Roelkens, E.-J. Geluk , T. De Vries , P. Regreny , D. Van Thourhout, R. Baets, G. Morthier, Heterogeneously Integrated Microdisk Lasers for Optical Interconnects and Optical Logic, SPIE Photonics West 2011 (invited), 7913, United States, p.791319 (2011)  Download this Publication (896KB).
    8. Y. De Koninck, G. Roelkens, R. Baets, Cavity Enhanced Reflector Based Hybrid Silicon Laser, 23rd Annual Meeting of the IEEE Photonics Society, United States, (2010)  Download this Publication (534KB).
    9. D. Van Thourhout, G. Roelkens, Heterogeneously Integrated SOI Compound Semiconductor Photonics, 35th European Conference on Optical Communications (ECOC 2009) (invited), Austria, p.4.2.1 (2009)  Download this Publication (827KB).
    10. T. Spuesens, L. Liu, T. De Vries, P. Rojo-Romeo, P. Regreny, D. Van Thourhout, Improved design of an InP-based microdisk laser heterogeneously integrated with SOI, 6th IEEE International Conference on Group IV Photonics, United States, p.FA3 (2009)  Download this Publication (1.4MB).
    11. Y. Halioua, T.J. Karle, F. Raineri, I. Sagnes, R. Raj, G. Roelkens, F. Van Laere, D. Van Thourhout, InP-based 2D photonic crystal lasers heterogeneously integrated and coupled to SOI wires, 6th IEEE International Conference on Group IV Photonics, United States, p.ThP12 (2009)  Download this Publication (433KB).
    12. T. Karle, Y. Halioua, F. Raineri, I. Sagnes, R. Raj, G. Roelkens, F. Van Laere, D. Van Thourhout, III-V photonic crystal lasers heterogeneously bonded to silicon-on-insulator waveguides, ICTON 2009 (invited), Portugal, (2009)  Download this Publication (160KB).
    13. Y. Halioua, T. Karle, F. Raineri, I. Sagnes, P. Monnier, R. Raj, G. Roelkens, D. Van Thourhout, R. Baets, Towards a new platform for integrated optics: III-V photonic crystals bonded to silicon on insulator wire waveguides, CLEO Europe, Germany, p.JSI1.3-TuE (2009)  Download this Publication (1.1MB).
    14. Y. Halioua, T. Karle, I. Sagnes, G. Roelkens, D. Van Thourhout, R. Raj, F. Raineri, InP 2-D Photonic Crystal lasers integrated onto SOI waveguides, Conference on Lasers and Electro-optics (CLEO), United States, p.CMP3 (2009)  Download this Publication (1.1MB).
    15. L. Liu, J. Van Campenhout, G. Roelkens, D. Van Thourhout, R. Baets, IIIV/SOI Heterogeneous Integration of Optoelectronic Devices, Asia Optical Fiber Communication and Optoelectronic Exhibition and Conference 2008 (invited), China, p.SaN6 (2008)  Download this Publication (323KB).
    16. T. Karle, Y. Halioua, F. Raineri, I. Sagnes, D. Van Thourhout, F. Van Laere, G. Roelkens, R. Raj, Laser emission from heterogeneously integrated InP photonic crystals into SOI wires, PECS VII, United States, (2008)  Download this Publication (117KB).
    17. L. Liu, J. Van Campenhout, P. Rojo-Romeo, P. Regreny, C. Seassal, D. Van Thourhout, S. Verstuyft, L. Di Cioccio, J.-M. Fedeli, C. Lagahe, R. Baets, Compact Multiwavelength Laser Source Based on Cascaded InP-Microdisks Coupled to One SOI Waveguide, The Optical Fiber Communication Conference 2008, United States, p.OWQ3 (2008)  Download this Publication (358KB).
    18. D. Van Thourhout, J. Van Campenhout, R. Baets, Pedro Rojo-Romeo, Phillippe Regreny, Christian Seassal, Chrystelle Lagahe, Xaveer Leijtens, Pietro Binetti, Richard Notzel, Meint Smit, Lea Di Cioccio, Jean-Marc Fedeli, Invited: A Photonic Interconnect Layer on CMOS, ECOC 2007 - European Conference on Optical Communications (invited), Germany, p.6.3.1 (2007)  Download this Publication (130KB).
    19. J. Van Campenhout, P. Rojo Romeo, P. Regreny, C. Seassal, D. Van Thourhout, L. Di Cioccio, J. M. Fedeli, R. Baets, Electrically Pumped InP-based Microdisk Lasers Integrated with a Nanophotonic SOI Waveguide Circuit, OFC 2007, United States, p.PDP 35 (2007)  Download this Publication (3.8MB).
    20. J. Van Campenhout, P. Rojo-Romeo, D. Van Thourhout, C. Seassal, P. Regreny, L. Di Cioccio, J. M. Fedeli, R. Baets, Electrically Injected InGaAsP Microdisk Lasers Heterogeneously Integrated on a Si-wafer, International Semiconductor Laser Conference, United States, p.133-134 (2006)  Download this Publication (289KB).
    21. P. Rojo-Romeo, J. Van Campenhout, P. Regreny, F. Mandorlo, C. Seassal, X. Letartre, G. Hollinger, D. Van Thourhout, R. Baets, J.M. Fedeli, L. Di Cioccio, InP on silicon electrically driven microdisk lasers for photonic ICs, International Conference on Indium Phosphide and Related Materials, (2006)  Download this Publication (441KB).
    22. J. Van Campenhout, P. Rojo-Romeo, D. Van Thourhout, C. Seassal, P. Regreny, L. Di Cioccio, J.M. Fedeli, R. Baets, An electrically driven membrane microdisk laser for the integration of photonic and electronic ICs, The 18th Annual Meeting of the IEEE Lasers & Electro-Optics Society (LEOS 2005), Australia, p.PD 1.7 (2005)  Download this Publication (487KB).
    23. J. Van Campenhout, P. Bienstman, D. Van Thourhout, R. Baets, Membrane-type DBR-microlasers for the integration of electronic and photonic ICs, Workshop on Photonic and Electromagnetic Crystal Structures (PECS-VI), Greece, p.D.32 (2005)  Download this Publication (807KB).
    24. J. Van Campenhout, P. Bienstman, R. Baets, Membrane-type photonic-crystal microlasers for the integration of electronic and photonic ICs, IEEE/LEOS BENELUX Chapter - 2004 Annual Symposium, Belgium, p.279-282 (2004)  Download this Publication (907KB).
    25. J. Van Campenhout, P. Bienstman, R. Baets, Band edge lasing in metal-clad multimode photonic crystal slabs, Photonic and Electromagnetic Crystal Structures (PECS-V), Japan, p.233 (2004)  Download this Publication (77KB).
        National Conferences

      1. J. Van Campenhout, D. Van Thourhout, P. Bienstman, C. Seassal, P. Rojo-Romeo, L. Di Cioccio, J.M. Fedeli, Membrane microlasers for the integration of photonic and electronic Ics, 6th UGent-FirW Doctoraatssymposium, Belgium, p.39 (paper nr. 29) (2005)  Download this Publication (945KB).

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