Authors: | J. Zhang, L. Bogaert, M. Billet, D. Wang, B. Pan, S. Qin, E. Soltanian, S. Cuyvers, D. Maes, T. Vanackere, T. Vandekerckhove, S. Poelman, M. Kiewiet, I. Luntadila Lufungula, X. Guo, H. Li, J. De Witte, G. Lepage, P. Verheyen, J. Van Campenhout, B. Kuyken, G. Morthier, D. Van Thourhout, R. Baets, G. Roelkens |
Title: | Photonic integrated circuits realized using micro-transfer printing |
Format: | International Conference Proceedings |
Publication date: | 7/2023 |
Journal/Conference/Book: | PIERS
(invited)
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Citations: | Look up on Google Scholar
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We present our work on heterogeneous integration through micro-transfer printing of opto-electronic components and material films on Si/SiN photonics integrated circuits with minimal modification to the existing silicon photonics process flow.